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Metal substrate of heat conducting aluminium-based core and preparation method thereof

A metal substrate and metal technology, which is applied in the manufacture of metal core circuits, circuit substrate materials, printed circuit components, etc., can solve the problem that the heat dissipation requirements of high-density component assembly circuit boards cannot be met, and the high thermal conductivity metal substrates cannot be fully promoted and used. Affecting the performance and reliability of the substrate and other issues, achieving the effect of light weight, high performance reliability and low production cost

Inactive Publication Date: 2011-11-23
SUN YAT SEN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The disadvantage of this type of insulating layer is that the thermal conductivity is too low (less than 2-3W / m·K), and the thermal expansion of organic thermal conductive adhesive is larger than that of metal, and it is easy to deform after being heated, which cannot meet the heat dissipation of high-density component assembly circuit boards at all. Require
However, due to the stress mismatch between alumina and metal wires, the substrate is prone to brittle cracks after heating, which seriously affects the reliability of substrate performance; and a large number of microporous structures on the surface of alumina will also have a certain impact on its insulation performance, so High thermal conductivity metal substrates prepared with alumina insulating layers still cannot be fully promoted and used

Method used

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  • Metal substrate of heat conducting aluminium-based core and preparation method thereof
  • Metal substrate of heat conducting aluminium-based core and preparation method thereof
  • Metal substrate of heat conducting aluminium-based core and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] Use oxalic acid system, add acetic acid, glycerol organic additives and anodic oxidation solution of yttrium sulfate inorganic additives to anodize the aluminum substrate to form a 10μm aluminum oxide insulating layer, and evaporate a layer of buffer layer - molybdenum and titanium alloy 300 ?, and then magnetron sputtering metal silver 800 ? to realize its electrical conductivity, and then electroplate copper 40μm, thicken the conductive layer, and test the thermal conductivity to 23W / m·K. Then, stick a film on the surface of the metal copper plating layer and perform etching treatment to obtain the required circuit; finally, electroless silver plating of 13 μm can obtain an aluminum-based core metal substrate with high thermal conductivity.

Embodiment 2

[0033] Using a sulfuric acid system, add malic acid, sulfosalicylic acid, ethylenediaminetetraacetic acid organic additives and anodic oxidation solution of cerium nitrate and lanthanum nitrate inorganic additives to anodize the aluminum substrate to form a 100μm aluminum oxide insulating layer. Magnetron sputtering a layer of buffer layer - tungsten and titanium alloy 500?, then ion-plating iron-nickel alloy 500? to realize its electrical conductivity, and then electroplating copper 50μm to thicken the conductive layer. The test thermal conductivity is 20W / m· K. Then, stick a film on the surface of the metal copper plating, etch to obtain the required circuit; finally electroless nickel / immersion gold 8μm, you can get an aluminum-based core metal substrate with high thermal conductivity.

Embodiment 3

[0035] Use oxalic acid-phosphoric acid system, add lactic acid, citric acid, ethylenediaminetetraacetic acid organic additives and anodic oxidation solution of yttrium sulfate, lanthanum nitrate inorganic additives, anodize the aluminum substrate to form a 35μm aluminum oxide insulating layer, ion plating A 500? metal tungsten buffer layer is placed on it, and then 600? Then, stick a film on the surface of the metal silver plating, etch to obtain the required circuit; finally, electroless tin plating of 10 μm can obtain an aluminum-based core metal substrate with high thermal conductivity.

[0036] The aluminum-based core metal substrates with high thermal conductivity prepared in the above three embodiments were baked at 300°C for 10 minutes, and there was no peeling phenomenon between the multilayer metal layers, and the performance reliability was extremely high.

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Abstract

The invention discloses a metal substrate of a heat conducting aluminium-based core and a preparation method thereof. The metal substrate is composed of a metal aluminium substrate, an alumina insulating layer, a buffer layer, a first conducting layer, a second conducting layer and a weldable layer, wherein the metal aluminium substrate, the alumina insulating layer, the buffer layer, the first conducting layer, the second conducting layer and the weldable layer are superposed successively. According to the preparation method, a surface of the aluminium substrate is processed by using an anodization solution to generate the alumina insulating layer; the buffer layer and the first conducting layer are coated on the alumina insulating layer by a physical deposition method and then the second conducting layer is coated by an electrochemical deposition method; pad pasting and etching processes are carried out on the surface of the second conducting layer to obtain a needed circuit; at last, the weldable layer metal is coated on the second conducting layer by the electrochemical deposition method. According to the invention, the metal substrate has advantages of light weight, high heat radiation efficiency, long service life, and high reliability of performance; moreover, the metal substrate completely meets packaging requirements of various components and has low production cost; therefore, the metal substrate provided in the invention satisfies a condition of large-scale industrial application.

Description

technical field [0001] The invention relates to a high thermal conductivity metal substrate material, in particular to a metal substrate with a high thermal conductivity aluminum-based core and a preparation method thereof. Background technique [0002] With the development of light, thin, small, high-density and multi-functional electronic products, the assembly density and integration of components on the circuit board are getting higher and higher, the power consumption is increasing, and the heat dissipation performance requirements of the substrate are also increasing. high. If the heat dissipation of the substrate is not good, it will cause the components on the circuit board to overheat and greatly reduce the overall reliability. Therefore, it is imminent to study metal substrates with reliable performance and high thermal conductivity. [0003] A metal substrate generally consists of a three-layer structure, namely a conductive layer (used as a circuit), an insulat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05K1/05H05K3/44
Inventor 崔国峰马达明
Owner SUN YAT SEN UNIV
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