Semiconductor chip assembly with post/base heat spreader and conductive trace
A technology for semiconductors and chipsets, applied in semiconductor devices, semiconductor/solid-state device components, and electrical solid-state devices, etc., and can solve the problems of limited routing capability, excessive volume, and unsuitable for low-cost mass production operations.
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[0074] Figure 1 to Figure 4 It is a cross-sectional view illustrating a method for manufacturing a post and a base in an embodiment of the present invention, Figure 5 and Image 6 respectively Figure 4 top and bottom views.
[0075] figure 1 Is a cross-sectional view of a metal plate 10 comprising opposing major surfaces 12 and 14 . The illustrated metal plate 10 is a copper plate having a thickness of 500 microns. Copper has the advantages of high thermal conductivity, good bonding and low cost. The metal plate 10 can be made of various metals such as copper, aluminum, iron-nickel alloy, iron, nickel, silver, gold, mixtures thereof and alloys thereof.
[0076] figure 2 It is a cross-sectional view showing a patterned etch stop layer 16 and a fully covered etch stop layer 18 formed on the metal plate 10 . The patterned etch resist layer 16 and the fully covered etch resist layer 18 shown in the figure are photoresist layers deposited on the metal plate 10, which are ...
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