Magnetic recording medium, magnetic recording/reproducing device and method for manufacturing magnetic recording medium
A magnetic recording medium and magnetic recording technology, applied in the direction of magnetic recording, configuration/installation of recording head, data recording, etc., can solve the problem of magnetic recording medium rotation, etc., and achieve the effects of preventing contact, high production efficiency, and excellent stability
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[0154] First, set a disk-shaped glass substrate for hard disk (HD) in the vacuum chamber, and the vacuum exhaust is 1.0×10 -5 Below Pa. As the glass substrate, the Li 2 Si 2 o 5 、Al 2 o 3 -K 2 O, Al 2 o 3 -K 2 O, MgO-P 2 o 5 , Sb 2 o 3 - A substrate having an outer diameter of 65 mm, an inner diameter of 20 mm, and an average surface roughness (Ra) of 2 angstroms, made of crystallized glass composed of ZnO.
[0155] A magnetic layer was formed on the glass substrate by DC sputtering. The magnetic layer was sequentially laminated with a backing layer made of a soft magnetic film of 60Fe30Co10B, an intermediate layer made of Ru, and a layer made of 70Co-5Cr-15Pt-10SiO. 2 The magnetic film of the grain structure formed by the alloy is obtained. Next, a thin film of a carbon mask layer was laminated on the magnetic layer by P-CVD method.
[0156] The film thickness of each layer was 60 nm for the back layer, 10 nm for the intermediate layer, 15 nm for the magnetic f...
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