Method for preparing diamond-silicon carbide-cobalt disilicide composite interlayer of diamond coating on hard alloy

A technology of composite intermediate layer and diamond coating, which is applied in the direction of metal material coating process, coating, gaseous chemical plating, etc., can solve the problem of insufficient adhesion between CVD diamond coating and cemented carbide substrate, and cannot effectively reduce the diamond coating. The peak shear stress of the film, the inability to further reduce micro pores and other problems, achieve broad industrialization prospects, easy control of process parameters, and enhanced toughness

Active Publication Date: 2010-11-10
DALIAN UNIV OF TECH
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Problems solved by technology

[0010] The technical problem to be solved by the present invention is to provide a method for preparing a diamond-silicon carbide-cobalt silicide composite intermediate layer for CVD diamond coating on cemented carbide to solve the problem of adhesion between CVD diamond coating and cemented carbide substrate. Insufficient problems to improve the service life of CVD diamond coatings on carbide tools and components
[0011] In order to overcome the shortcomings that the existing intermediate layer cannot completely prevent Co from diffusing to the surface, cannot further reduce the tiny pores between the diamond grains at the interface and the interface, and cannot effectively reduce the peak shear stress in the diamond film, the invention provides a method for preparing diamond - Method of silicon carbide-cobalt silicide composite interlayer

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  • Method for preparing diamond-silicon carbide-cobalt disilicide composite interlayer of diamond coating on hard alloy
  • Method for preparing diamond-silicon carbide-cobalt disilicide composite interlayer of diamond coating on hard alloy

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Embodiment 1

[0032] Use the YG6X (WC-6% Co) cemented carbide blade sold on the domestic market as the substrate, and prepare the diamond-silicon carbide-cobalt silicide composite intermediate layer and the top layer of diamond coating on it, and its specific implementation steps are as follows:

[0033] The first step: perform conventional pretreatment on the substrate, ultrasonically clean the cemented carbide in alcohol for 10 minutes, and then immerse it in a KOH:K 3 [Fe(CN) 6 ]: H 2 In the solution of O=1:1:10 (mass ratio) for 10 minutes, then immersed in the H 2 SO 4 :H 2 o 2 =1:10 (volume ratio) solution for 1 minute to etch the cobalt on the surface of the cemented carbide.

[0034] Step 2: Sonicate the cemented carbide for 60 minutes in an alcohol suspension containing diamond micropowder and nanopowder to pre-nucleate, and then ultrasonically clean it with alcohol for 10 minutes.

[0035] The third step: Put the pretreated cemented carbide substrate into the vacuum chamber, ...

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Abstract

The invention discloses a method for preparing a diamond-silicon carbide-cobalt disilicide composite interlayer of a diamond coating on a hard alloy and belongs to the technical field of diamond coatings. The method is characterized in that: direct current plasma-assisted hot filament chemical vapor deposition (CVD) technology is adopted, hydrogen, methane and tetramethylsilane are used as reactant gases, the diamond-silicon carbide-cobalt disilicide composite interlayer is deposited on the hard alloy of which the surface is etched for removing cobalt, the composite interlayer is subjected to isothermal treatment in an atmosphere of methane and hydrogen in a volume ratio of 1 percent, and a diamond thin film is deposited on the composite interlayer. The method has the advantages that: the cobalt disilicide generated in the composite interlayer improves the adhesive force between a CVD diamond coating and a hard alloy substrate and the toughness of the CVD diamond coating obviously. The process of the invention is easy to control, can be applied to hard alloy CVD diamond coating tools and parts and large-area CVD diamond coatings and has a promising industrial prospect.

Description

technical field [0001] The invention belongs to the technical field of chemical vapor deposition (CVD) diamond coatings, and relates to a method for improving the adhesion of CVD diamond coatings, in particular to a method for preparing diamond-silicon carbide-cobalt silicide composite intermediates on cemented carbide. layer method. Background technique [0002] Cemented carbide (WC-Co) has excellent comprehensive properties such as high hardness, wear resistance, heat resistance, and high fracture toughness. It is mainly used as a tool material and is widely used in the field of machining. In addition, cemented carbide is also used to make tools, molds and wear-resistant parts. Diamond has excellent properties such as the highest hardness among known substances, low friction coefficient, highest thermal conductivity and extremely high chemical stability. Coating diamond film on cemented carbide tools and parts by chemical vapor deposition (CVD) will greatly improve the w...

Claims

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Application Information

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IPC IPC(8): C23C16/42C23C16/32C23C16/27C23C16/44
Inventor 项礼姜辛王陶
Owner DALIAN UNIV OF TECH
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