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Indium oxalate dissolving agent composition

A dissolving agent and composition technology, applied in the direction of detergent composition, non-surface active detergent composition, surface etching composition, etc., can solve the problem of reduced in-plane uniformity of etching characteristics, poor etching properties, and changes in the inner diameter of pipes. Small problems, to achieve the effect of increasing the maximum dissolved amount

Inactive Publication Date: 2010-11-03
KANTO CHEM CO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] For example, it will cause abnormalities such as the inner diameter of the piping becomes smaller, valve switches and pumps malfunction, filters and nozzles are clogged, etc.
When these abnormalities occur in the etching process, it will have a great impact on the etching characteristics, such as a decrease in in-plane uniformity and poor etching properties, resulting in a fatal problem of lower product yield.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0051] The relationship between the concentration of alkaline components and the dissolved amount of indium oxalate

[0052] Table 1 shows the relationship between the pH and the dissolved amount of indium oxalate depending on ethylenediaminetetraacetic acid and ammonia. The indium oxalate dissolving agent is prepared by adding raw materials and water according to the ratio in Table 1, and stirring until the chelating agent is completely dissolved. Regarding the dissolved amount of indium oxalate, the prepared indium oxalate dissolving agent was heated to 40° C., indium oxalate was added to the dissolving agent, stirred for 4 hours, and its solubility was examined.

[0053] Table 1

[0054] serial number

Ethylenediaminetetraacetic acid (%)

Ammonia (%)

pH

Indium oxalate dissolved amount (%)

Comparative example 1

5.0

0

-

- ※

Example 1

5.0

3.0

10.0

3.8

Example 2

5.0

...

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PUM

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Abstract

The invention provides an indium oxalate dissolving agent composition, which solves the prior problems. The indium oxalate dissolving agent chemically dissolves and removes the indium oxalate deposited on a wet etching device of a transparent conductive film formed by a tin indium oxide (ITO) film or an indium zinc oxide (IZO) film. The invention relates to a dissolving agent composition for dissolving and removing the indium oxalate deposited in the etching device system, characterized in that: the dissolving agent composition is an aqueous solution containing an alkali component and one or more two kinds of compounds selected from aminopolycarboxylic acid and its salt. The invention also relates to a cleaning method in the etching device system using the dissolving agent composition.

Description

technical field [0001] The present invention relates to a dissolving agent capable of dissolving and removing indium oxalate deposited in a device for etching ITO (indium tin oxide), IZO (indium zinc oxide) and the like. Background technique [0002] In FPD (Flat Panel Display) display devices such as LCD (Liquid Crystal Display) and ELD (Electro Luminescence Display), transparent conductive films are used in pixel display electrodes and the like. As materials for these transparent conductive films, ITO (indium tin oxide), IZO (indium zinc oxide), and the like are often used. Usually, the processing method of display electrodes using ITO and IZO is to use an etchant (such as Patent Document 1) with oxalic acid as the main component, and use a patterned resist film as a mask to wet etch ITO and IZO. , thus forming the target ITO, IZO display electrode pattern. [0003] Wet etching of ITO film or IZO film with oxalic acid as the main component of etching solution is through ...

Claims

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Application Information

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IPC IPC(8): C23F1/32C09K13/06H01L21/306
CPCC11D7/32C23F1/08C23F1/30C23F1/32C23F17/00H01L21/306
Inventor 山口隆雄石川典夫
Owner KANTO CHEM CO INC
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