A graphite electrode functional ceramic device and its preparation method
A technology of graphite electrodes and functional ceramics, applied in the field of functional ceramic materials, can solve the problems of low product qualification rate and poor firmness of silver electrodes, and achieve the effects of improving electrical performance, solving poor firmness and uniform coating.
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Embodiment 1
[0020] Will be polished and cleaned on both sides (Na 0.535 K 0.480 ) 0.942 Li 0.058 )NbO 3 -0.01CuO piezoelectric ceramic disc is placed as a substrate in a vacuum of 2×10 -4 Pa magnetron sputtering device, the substrate temperature is room temperature. Use Ar + After being accelerated by an electric field, high-energy incident particles hit the graphite target, causing the graphite atoms to leave the target and be sputtered out. The graphite electrode film is attached, accumulated, and deposited on a ceramic substrate placed a few centimeters away from the surface of the target. Sputtering time is 2 hours, and finally the film thickness is 700nm, the particle size is 200-300nm, and the conductivity is 0.813×10 5 S / m graphite, then annealed at 500℃ for 30min. Then put it in silicone oil and heat it to 120°C, keep it for 50min at a voltage of 4kV / mm for polarization, and finally drop to room temperature to test the related performance.
[0021] The test results of each performance...
Embodiment 2
[0024] Bi that has been polished and cleaned on both sides 0.5 Na 0.5 TiO 3 The piezoelectric ceramic disc is placed as a substrate in a vacuum of 2×10 -4In the Pa pulsed laser deposition device, heat the substrate to 200°C, turn on the flash molecule pulsed laser, introduce the pulsed laser into the vacuum growth chamber, and focus on the graphite target. The target absorbs the high energy of the laser beam and instantly melts and evaporates the graphite. Feather clusters are deposited on the substrate to grow a graphite conductive film, the deposition time is 60min, and the final film thickness is 5μm, the particle size is 200-300nm, and the conductivity is 0.930×10 5 S / m graphite is subsequently annealed at 400°C for 30 min. Then put it in silicon oil and heat it to 120°C, keep it for 50min at a voltage of 4kV / mm for polarization, and finally drop to room temperature to test the related performance.
[0025] The test results of each performance are shown in Table 2:
[0026] ...
Embodiment 3
[0028] Will be polished and cleaned on both sides (Na 0.517 K 0.446 Li 0.038 )NbO 3 The piezoelectric ceramic disc and graphite target are placed in a vacuum of 2×10 -4 Pa vacuum coating device, heated to 80℃, filled with argon gas to make the pressure reach 2×10 -1 Pa. The arc current is 100A, the distance between the two electrodes is 100mm, the coating speed is 0.3nm / s, and the final film thickness is 1μm, the particle size is 100-200nm, and the conductivity is 0.121×10 6 S / m graphite, then put it in silicone oil and heat it to 120°C, keep it at 4kV / mm voltage for 50min for polarization, cool it down to room temperature, and test the related performance.
[0029] The test results of each performance are shown in Table 3:
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