Preparation of surface reinforced Raman active substrate of large area micro-nano dendritical structure array
A surface-enhanced Raman and tree-like structure technology, applied in the field of nanomaterials, can solve the problem of weak ability to capture gas molecules and achieve high-sensitivity SERS activity
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[0029] Fabrication of Silicon Microcolumn Arrays
[0030] The preparation method of the silicon microarray in the present invention is mainly based on silicon dry plasma etching technology. figure 2 Shown is a flow chart of the fabrication of silicon microarrays. Firstly, the micron lattice pattern is realized on the silicon wafer by ultraviolet lithography technology, and the etching mask used is ultraviolet positive photoresist. The ICP etching equipment used is the ICP180 plasma etching system produced by Oxford Instruments, UK. It is characterized by the following process conditions: temperature 15°C, etching gas SF6 flow rate 100 sccm, passivation gas C4F8 flow rate 100 sccm, RF power 10W, and ICP power 500W.
[0031] Assembly of Nanorod Arrays Based on Silicon Micropillar Arrays
[0032] To grow nanorod arrays on silicon microcolumn arrays, silicon or zinc oxide nanoarrays are grown mainly by chemical vapor phase synthesis based on a gas-liquid-solid mechanism. The ...
Embodiment 1
[0037] Example 1: Different concentrations of rhodamine as probes, SERS test with micro-nano dendritic structure array as SERS active substrate
[0038] Using the SERS active substrate of the present invention, the SERS spectrum detection is carried out with different concentrations of rhodamine as probes. The Raman spectrometer used is a confocal focused Raman spectrometer (France, JY LABRAM-HR), the laser source is an argon ion laser, the excitation wavelength is 514.5nm, the laser power reaching the sample is 1mW, and the integration time is 0.1 second. The test results show that the intensity of the rhodamine Raman scattering peak of the SERS active substrate of the present invention decreases with the decrease of the rhodamine concentration, which can be used for quantitative detection. See attached Image 6 .
Embodiment 2
[0039] Example 2: The SERS test of gas-phase TNT as a SERS active substrate with a micro-nano tree structure array
[0040] Using the SERS active substrate of the present invention, the gas-phase TNT was detected by SERS spectrum. The SERS active substrate of the present invention and the TNT solid powder are put into a certain volume (0.3 cubic meter) airtight container together, take out after 8 hours, the TNT vapor concentration in the airtight container is regarded as the TNT saturated vapor pressure concentration under the standard state, i.e. 5ppb v . SERS test was carried out on the active substrate (see attached Figure 7 ), the Raman spectrometer used is the same as in Example 1. , the test parameters are: the laser light source is an argon ion laser, the excitation wavelength is 514.5nm, the laser power reaching the sample is 1mW, and the integration time is 0.5 seconds. The test results show that the TNT Raman characteristic peak of the SERS active substrate of t...
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