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Micro light-filter piece built in mercury-cadmium-telluride infrared focal plane detector chip

A technology of infrared focal plane and detector chip, which is applied in the field of optical filters, can solve the problems of uniformity, reliability and transmittance of impossible optical filters, and achieve the effect of convenient use and high control precision

Active Publication Date: 2008-12-17
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

Since the traditional optical filter is realized by optical coating technology, it is impossible to greatly improve the uniformity, reliability and transmittance of the optical filter by optimizing the coating technology

Method used

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  • Micro light-filter piece built in mercury-cadmium-telluride infrared focal plane detector chip
  • Micro light-filter piece built in mercury-cadmium-telluride infrared focal plane detector chip
  • Micro light-filter piece built in mercury-cadmium-telluride infrared focal plane detector chip

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Embodiment Construction

[0017] Below in conjunction with accompanying drawing, take the infrared focal plane detector that built-in short-wave cut-off wavelength is 1.95 μ m micro-filter as embodiment, the specific embodiment of the present invention is described in further detail:

[0018] The embodiment adopts P-on-n heterogeneous mesa junction HgCdTe infrared focal plane detector, the cut-off wavelength of the micro-filter is 1.95 μm, and its preparation process is as follows:

[0019] A. Firstly, a CdTe buffer layer 2 is sequentially grown on the GaAs substrate 1 by molecular beam epitaxy technology, with a thickness of 4 μm;

[0020] B. Re-growth indium doping concentration is 3.0×10 17 , N-type Hg with a thickness of 5 μm and a composition of 0.545 1-0.545 Cd 0.545 Te material is used as a micro filter 3 with a cutoff wavelength of 1.95 μm. The reciprocal of the absorption coefficient of the micro-filter HgCdTe material is only 1 μm, much smaller than 5 μm. Therefore, when the incident wave...

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Abstract

The invention discloses a micro light filter which is set in the slug of the mercury-cadmium-telluride infrared detector. The detector slug is made up of the underlay, the buffer layer, the photodiode embattle which is respond to the infrared target radiation. The micro light filter is extended between the buffer layer and the photodiode embattle. So it has the advantage of high uniformity, high reliability and no signal loss; the filtering band is reached by controlling the composition of the Hg1-xCdxTe; also it doesn't need any external light path parts.

Description

technical field [0001] The invention relates to an optical filter, in particular to a micro optical filter placed inside a mercury cadmium telluride (HgCdTe) infrared focal plane array device chip. Background technique [0002] Infrared focal plane array device is an advanced imaging sensor with both infrared information acquisition and information processing functions. There are important and extensive applications in military and civilian fields. Due to its irreplaceable status and role, major industrial countries in the world have listed HgCdTe infrared focal plane array devices as key high-tech projects for development. [0003] Driven by the advanced infrared application system, infrared detection technology has entered an important development stage of the third generation infrared focal plane detector characterized by large area array, miniaturization and multicolor, see S.Horn, P . Norton, T. Cincotta, A. Stoltz, et al, "Challenges for third-generation cooled image...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/20G01J5/00
Inventor 叶振华何力胡晓宁周文洪吴俊巫艳丁瑞军
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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