Method and device for vibration control

Abstract

A vibration control system comprising an actuator, and a sensor useful for controlling vibrations in systems for fabricating electronics equipment. The actuator may comprise one or more plates or elements of electro-active material bonded to an electroded sheet.

Description

RELATED APPLICATIONS [0001] This application claims the benefit of U.S. Application No. 60 / 117,671, filed Jan. 28, 1999, and is a continuation-in-part of U.S. application Ser. No. 09 / 261,475, filed Feb. 26, 1999, which is a continuation-in-part of U.S. application Ser. No. 08 / 943,645, filed Oct. 3, 1997, which is a contination of U.S. application Ser. No. 08 / 188,145, filed Jan. 27, 1994, the disclosures of each of which are hereby incorporated by reference.BACKGROUND OF THE INVENTION [0002] In the competitive marketplace which exists for automated surface-mount (SMT) electronics equipment, including systems for fabricating electronics equipment or components, improvements in accuracy and speed are a significant advantage. Such equipment is often used in fabricating, for example, semiconductor chips, printed circuit boards, liquid crystal displays, and thin film devices, and may feature multiple gantry / head assemblies, linear motors, photoimaging systems, etching systems, and / or a nu...

AI Technical Summary

Benefits of technology

[0011] In a particularly preferred embodiment, a vibration control system in accordance with the invention comprises an induced-strain actuator that acts directly on the strain state of the structure, and has virtually no distortion. Such an actuator can excite, and therefore control, only the elastic vibration modes of the controlled structure, leaving all other vibration modes (such as the modes of various equipment housing structures, etc.) uncontrolled. This contributes to the control system simplicity and robustness.

[0017] In an embodiment of the invention wherein the vibration control system has a feed forward control, in addition to the feedback control (controller driven by signals originating from sensors which monitor the structural vibration), an additional signal which is in phase with a harmonic disturbance (such as motor rotation) provided to the controller. The controller feeds forward a filtered version of this signal. The gains which adjust the magnitude and phase of the feed forward control relative to the disturbance signal are adjusted adaptively to minimize the influence of the disturbance on the performance.

[0023] By way of illustration, an example below describes a construction utilizing rectangular PZT plates a quarter millimeter thick, with length and width dimensions each of one to three centimeters, each element thus having an active strain-generating face one to ten square centimeters in area. The PZT plates are mounted on or between sheets of a stiff strong polymer, e.g., one half, one or two mil polyimide, which is copper clad on one or both sides and has a suitable conductive electrode pattern formed in the copper layer for contacting the PZT plates. Various spacers surround the plates, and the entire structure is bonded together with a structural polymer into a waterproof, insulated closed package, having a thickness about the same as the plate thickness, e.g., 0.30 to 0.50 millimeters. So enclosed, the package may bend, extend and flex, and undergo sharp impacts, without fracturing the fragile PZT elements which are contained within. Further, because the conductor pattern is firmly attached to the polyimide sheet, even cracking of the PZT element does not sever the electrodes, or prevent actuation over the full area of the element, or otherwise significantly degrade its performance.

Problems solved by technology

Such an actuator can excite, and therefore control, only the elastic vibration modes of the controlled structure, leaving all other vibration modes (such as the modes of various equipment housing structures, etc.) uncontrolled.

Images