Method for magnesia nanometer line epitaxial growth from strontium titanate monocrystal chip

Abstract

The method to epitaxial grow magnesia nano line on single crystal substrate of strontium titanate relates to micro-electronics material field particular to the application on hetero epitaxy center nano line and its periodic surface structure of oxide (magnesis)-composite oxide (strontium titanate). Wherein, on vacuum condition, taking thermal treatment to the said substrate to strip with laser the magnesia ceramics material and depositing the laser plasma on the substrate to obtain magnesia thin membrane; monitoring the depositing process till forming said nano line. The product has special properties on optical, electric, magnetism, chemistry.

Description

technical field [0001] The invention relates to the field of microelectronic materials, in particular to a method applied to oxide (magnesium oxide)-composite oxide (strontium titanate) heterogeneous epitaxy to prepare a nano film with a surface periodic structure. Background technique [0002] Nanowires and nanobelts are a new type of quasi-one-dimensional structure materials, which have attracted extensive attention in research and application. This structure shows superior electrical, optical, mechanical, and thermal properties, and its application range covers chemical biosensors, field-effect transistors, functional ceramics, optoelectronic devices, and logic integrated circuits. [0003] Based on a deep understanding of material properties, the rational design and control of this one-dimensional structure creates conditions for the further preparation of new nanostructured materials and devices. Typically, growing one-dimensional structures requires controlling two di...

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Problems solved by technology

This requirement makes structural control more difficult relative to the limitations of growing zero-dimensional and two-dimensional structures

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