Manufacturing method of miniature thermoelectric device

Abstract

The invention discloses a manufacturing method of a miniature thermoelectric device and belongs to the technical field of semiconductor devices. According to the invention, a thermoelectric film mask and an electrode layer mask are fixed on a monolithic substrate, and a thermoelectric film and an electrode layer are prepared on the monolithic substrate by using a molecular beam epitaxial growth technology and an electron beam evaporation coating technology respectively; welding coatings are prepared at the bottom end of the top ceramic plate and the top end of the bottom ceramic plate through the mask deposition technology; stacking a plurality of single substrates on the bottom ceramic plate in parallel, and welding the single substrates on the bottom ceramic plate through a welding coating; and covering the top ceramic plate, and welding the top ceramic plate and the monolithic substrate together through the welding coating, thereby completing the manufacturing of the micro thermoelectric device. The in-plane structure of the miniature thermoelectric device is adopted to manufacture the monolithic substrate, and compared with a pi-type structure of a traditional thermoelectric device, the miniature thermoelectric device has the advantages of being long in thermoelectric arm, beneficial to temperature difference establishment, miniaturized and the like.

Description

technical field [0001] The invention belongs to the technical field of semiconductor devices, and in particular relates to a manufacturing method of a micro thermoelectric device. Background technique [0002] Among many new energy technologies, thermoelectric conversion technology has attracted much attention because it can directly utilize various waste heat in daily production to generate electricity. At the same time, the new generation of intelligent and flexible micro-nano electronic systems represented by wearable and implantable devices urgently need to develop micro-watt-milliwatt-level self-powering technology, which can be combined with primary and secondary battery technology to improve the stability of device operation. and service life. Thermoelectric materials, because they can generate electricity by utilizing the temperature difference between human body temperature and the surrounding environment, have become an effective solution for the self-powering tec...

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Problems solved by technology

[0008] However, when the heat source is non-flat, this traditional π-shaped thermoelectric device is no longer applicable.

For example, automobile exhaust exhaust pipes, such as using π-shaped thermoelectric power generation modules to manufacture thermoelectric power generation devices that match the heat source (such as US Patent No. Good contact between heat sources, so that the structure of the generator becomes very complicated, the production cost is high, and the performance and reliability of the generator are low

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