Black phosphorene-containing graphene flexible resistive random access memory and preparation method thereof

Abstract

The invention provides a black phosphorene-containing graphene flexible resistive random access memory and a preparation method thereof. The preparation method of the resistive random access memory comprises the steps of cleaning a Al2O3 substrate; depositing a Ni / Au composite thin film by an electron beam evaporation technology to obtain a bottom electrode layer; transferring a black phosphorene-containing graphene composite thin film material on the bottom electrode layer by a transfer method to obtain a resistive changing functional layer; forming a top electrode pattern by a photoresist patterning process, depositing a Ag, Cu or Ni thin film by the electron beam evaporation technology to form a top electrode layer, and removing and stripping photoresist to form a memory unit; and forming a coating layer pattern by the photoresist patterning process, depositing the Al2O3 thin film again by an atomic layer deposition technology to form a coating layer, and removing and striping the photoresist to form the black phosphorene-containing graphene flexible resistive random access memory. The resistive random access memory prepared according to the method is simple in structure, fast in erasure speed and small in operation voltage, non-destructive readout is achieved, and the resistive random access memory can be used for fabricating a large-area flexible device.

Description

Technical field [0001] The invention belongs to the technical field of memory materials, and specifically relates to a graphene flexible resistive random access memory containing black phosphorene and a preparation method thereof. Background technique [0002] Two-dimensional crystals are nano-thickness planar crystals stacked by a single atomic layer of a base layer. They have unique electrical, optical and magnetic properties, and have their own unique structural advantages. Common two-dimensional materials include graphene and silylene. , Molybdenum disulfide and black phosphorene, etc. [0003] Black scale is a kind of wavy layered crystal structure similar to graphite. The atomic layers are combined by van der Waals force and can be easily exfoliated into single-layer or few-layer nano-sheets. In the mono-atomic layer, each phosphorus atom is connected to the adjacent three. Phosphorus atoms form a pleated honeycomb structure with covalent bonds. Black phosphorene is a natur...

AI Technical Summary

Problems solved by technology

With the understanding of black phosphorene materials, black phosphorene has gradually been applied in field effect transistors, optoelectronic devices, gas sensors and solar cells, but the application in memory is rare.

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