Solid self-lubricating coating and preparation method thereof
A solid self-lubricating, lubricating layer technology, applied in coatings, lubricating compositions, metal material coating processes, etc., can solve the problems of limited size of coating materials, uneven distribution of graphene, poor friction stability, etc. Avoid system instability, high chemical bond strength, excellent wear resistance
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Embodiment 1
[0032] Embodiment 1, a solid self-lubricating coating, the solid self-lubricating coating includes a bottom intrinsic support layer and a surface lubricating layer in order from bottom to top, wherein the surface lubricating layer is intrinsically supported at the bottom by a post-treatment method The surface of the layer is generated in situ; the bottom intrinsic support layer is composed of a hard diamond-like phase, composed of sp 2 and sp 3 Mixed hybrid carbon structure, where sp 3 The atomic percentage content is 25-70%; the surface lubricating layer is composed of a soft graphitized phase, and the soft graphitized phase is composed of sp 3 , sp 2 , sp hybridized carbon structure, where sp 2 The atomic percentage content is more than 90%, and the six-membered ring content in the ring structure is more than 60%.
[0033] The hard diamond-like phase has an amorphous structure, and the soft graphitized phase has an amorphous or quasi-crystalline structure.
[0034] Both...
Embodiment 2
[0040] Embodiment 2, this embodiment provides a kind of preparation method of solid self-lubricating coating, comprises the following steps:
[0041] S1 places the substrate after ultrasonic cleaning on the workpiece bracket in the vacuum chamber;
[0042] S2 adopts magnetron sputtering to deposit diamond-like solid phase, and the target material is high-purity graphite target. After the vacuum chamber pressure is adjusted to 2.7×10-3Pa, the magnetron sputtering source is turned on, 60sccm argon gas is introduced, and the sputtering current is 3.0 A, the substrate negative bias is 150V, the chamber pressure is 0.6Pa, and the sputtering time is 120min;
[0043] S3 Wait until the temperature of the vacuum chamber drops to room temperature, open the chamber, take out the substrate, and irradiate the surface with laser at a temperature of 600K and heat treatment time of 300s to realize the graphitization transformation of the surface structure and finally form the solid self-lubri...
Embodiment 3
[0045] Embodiment 3, this embodiment provides a kind of preparation method of solid self-lubricating coating, comprises the following steps:
[0046] S1 places the substrate after ultrasonic cleaning on the workpiece bracket in the vacuum chamber;
[0047] S2 adopts magnetron sputtering to deposit diamond-like solid phase, and the target material is high-purity graphite target. After the vacuum chamber pressure is adjusted to 2.7×10-3Pa, the magnetron sputtering source is turned on, 60sccm argon gas is introduced, and the sputtering current is 3.0 A, the substrate negative bias is 150V, the chamber pressure is 0.6Pa, and the sputtering time is 120min;
[0048] S3 Wait until the temperature of the vacuum chamber drops to room temperature, open the chamber, take out the substrate, and irradiate the surface with laser at a temperature of 1600K and heat treatment time of 60s to realize the graphitization transformation of the surface structure and finally form the solid self-lubri...
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