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Method for improving bonding strength of wear-resistant protective coating on surface of insulating substrate

A technology of insulating substrate and protective coating, applied in the direction of coating, metal material coating process, ion implantation plating, etc., can solve problems such as damage to coating quality, micro-arc discharge, breakdown, etc., to reduce coating stress , control energy, reduce the effect of charging effect

Pending Publication Date: 2022-03-18
GUANGDONG ZHENHUA TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Vapor-deposited hard and wear-resistant protective coatings are all completed in a plasma atmosphere. Due to charge transfer, the positive charges on the surface of the coating grown on the surface of the insulating substrate cannot be neutralized by electrons from the substrate table, and the growing coating A large amount of positive charge will accumulate on the surface of the coating. As the charge accumulation increases, micro-arc discharge or breakdown phenomenon will easily occur, which will seriously damage the coating quality.
Therefore, there are still many problems in the preparation of high-adhesion wear-resistant protective coatings on the surface of insulating substrates.

Method used

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  • Method for improving bonding strength of wear-resistant protective coating on surface of insulating substrate
  • Method for improving bonding strength of wear-resistant protective coating on surface of insulating substrate
  • Method for improving bonding strength of wear-resistant protective coating on surface of insulating substrate

Examples

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Effect test

Embodiment 1

[0039] S1, substrate cleaning: place the alumina insulating substrate 1 in acetone, deionized water and ethanol in sequence for ultrasonic cleaning for 15 minutes each, and then dry it for later use.

[0040] S2, strong beam argon ion bombardment: place the aluminum oxide substrate on the substrate stage of vacuum ion plating, vacuumize, and the background vacuum reaches 5×10 -4 Pa, the substrate temperature is heated to 300°C, the argon gas is introduced at 100 sccm, the column arc shield is closed, the column arc Ti target is opened, and the auxiliary anode ion source is connected, the ion source current is 80A, the negative bias voltage amplitude of the substrate is 300V, and the argon The ion etching cleaning time is 40min.

[0041] S3, preparation of pure metal Ti transition layer 2: Turn on the Ti circular arc target, set the Ti target arc current to 120A, deposition pressure to 3.5Pa, substrate negative bias voltage amplitude gradually reduced from 300V to 50V, duty cyc...

Embodiment 2

[0046] S1, substrate cleaning: place the alumina insulating substrate 1 in acetone, deionized water and ethanol in sequence for ultrasonic cleaning for 15 minutes each, and then dry it for later use.

[0047] S2, strong beam argon ion bombardment: place the aluminum oxide substrate on the substrate stage of vacuum ion plating, vacuumize, and the background vacuum reaches 5×10 -4 pa, the substrate temperature is heated to 300°C, argon gas is introduced to 100 sccm, the column arc shield is closed, the column arc Ti target is opened, and the auxiliary anode ion source is connected, the ion source current is 80-110A, and the substrate negative bias voltage amplitude is 300V , Argon ion etching cleaning time is 40min.

[0048] S3, preparation of pure metal Ti transition layer 2: Turn on the Ti circular arc target, set the Ti target arc current to 120A, deposition pressure to 3.5Pa, substrate negative bias voltage amplitude gradually reduced from 300V to 50V, duty cycle to 60%, obt...

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Abstract

The invention discloses a method for improving binding force of a wear-resistant protective coating on the surface of an insulating substrate. The method comprises the following steps: cleaning the substrate; strong beam argon ion bombardment; preparing a pure metal Ti transition layer; preparing an AlTiN wear-resistant protective coating; according to the method, column arc is used for assisting in enhancing argon ion composite cleaning, arc light and glow synergistic discharge is achieved, the plasma density and energy are improved, the interface bonding problem of the coating and an insulating substrate is solved, meanwhile, the residual stress of the substrate is compensated through a pure metal transition layer, and the lattice mismatching problem between the coating and the substrate is relieved; and finally, the wear-resistant protective coating is prepared in a pulsed bias arc ion plating mode, and high-quality preparation of the hard coating of the insulating substrate is achieved by dynamically adjusting the plasma sheath layer, reducing the charging effect of the insulating surface, effectively controlling the deposited ion energy and reducing the coating stress at the same time.

Description

technical field [0001] The invention relates to the technical field of surface coatings, in particular to a method for improving the bonding strength of a wear-resistant protective coating on the surface of an insulating substrate. Background technique [0002] Take Al 2 o 3 、Cr 2 o 3 , SiO 2 The representative oxide insulating material has high electrical insulation performance and good high temperature stability, and has been widely used in the field of machinery manufacturing, such as insulated bearings, embedded thin film sensors, etc. However, under strong mechanical load conditions, oxide insulating materials have insufficient friction and wear resistance, which leads to failure of electrical insulation function and seriously affects the reliability of components. The physical vapor deposition (PVD) coating with transition metal nitride as the mainstream has ultra-high hardness and good wear resistance and friction reduction performance, and has become an effectiv...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/02C23C14/06C23C14/18C23C14/32
CPCC23C14/021C23C14/022C23C14/025C23C14/18C23C14/0641C23C14/325
Inventor 张林潘德成王启民李伯荣张世宏
Owner GUANGDONG ZHENHUA TECH CO LTD
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