Gas film composite tungsten-rhenium alloy film thermocouple based on surface microcolumn array

Abstract

The invention discloses a gas film composite tungsten-rhenium alloy film thermocouple based on a surface micro-column array. The tungsten-rhenium alloy film thermocouple is arranged on the surface of a planar alumina ceramic substrate, and the tails of the tungsten-rhenium alloy film thermocouple are respectively connected with the corresponding metal leads; a plurality of micron micro-columns are arranged on the surface of the tungsten-rhenium alloy film thermocouple in an array manner to form an aluminum oxide micro-column array, the middles of the micron micro-columns are filled with air to form air film holes, and the planar aluminum oxide ceramic substrate, the tungsten-rhenium alloy film thermocouple and the aluminum oxide micro-column array form a three-layer laminated structure. The gas film composite tungsten-rhenium alloy film thermocouple is reasonable in scheme and simple in structure, is easy to implement and is capable of giving full play to the advantage of directional flowing of the microstructure air film holes.

Description

technical field [0001] The invention belongs to the technical field, and in particular relates to a gas-film composite tungsten-rhenium alloy thin-film thermocouple based on a surface microcolumn array. Background technique [0002] The early thermocouple was invented in 1821. After that, the thermocouple temperature sensor has achieved great success in the fields of steam temperature measurement, thermal response to explosion products, heating, and measuring the surface temperature of high-temperature objects. The new thermocouple structure based on MEMS technology has been widely mentioned in recent years. It has the advantages of simple structure, convenient manufacture, wide measurement range, high precision, small inertia and easy remote transmission of output signals. [0003] At present, thin-film thermocouples are prepared by using tungsten-rhenium alloy and alumina ceramics, which not only meet the temperature measurement at high temperature for a long time, but als...

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Problems solved by technology

However, when it is used to detect the temperature of molten steel at high temperature, since the molten steel is easy to adhere to the surface of the film, and even solidifies to form steel, the surface thickness of the film will rise sharply during use, and the thermal resistance will increase significantly, making it difficult to use.

[0004] There are also thin-film thermocouple temperature sensors, which are difficult to directly measure the temperature of water for a long time without packaging

If the package shell is added, the response time will be greatly increased, resulting in slow response of the sensor

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