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AlCrSiBNiN nano-composite coating as well as preparation method and application thereof

A nano-composite coating and nano-composite technology, applied in the coating, metal material coating process, ion implantation plating and other directions, can solve the problems such as the inability to thicken the coating thickness, the poor fracture toughness of the coating, and the reduction of tool life.

Active Publication Date: 2021-11-19
广东华升纳米科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the fracture toughness of this type of nanocrystalline / amorphous composite structure coating is poor, and the coating tool is easy to collapse during use, the coating thickness cannot be thickened, and the coating is easy to be processed at high temperature. Material reacts and sticks, resulting in significantly reduced tool life

Method used

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preparation example Construction

[0044] The present invention also provides the preparation method of above-mentioned AlCrSiBNiN nanocomposite coating, comprises the following steps:

[0045] In an atmosphere containing nitrogen, the AlCr alloy target is used to perform arc ion plating (AIP) film, and the AlCrN layer is deposited on the substrate;

[0046] In an atmosphere containing nitrogen, the AlCrSiBNi alloy target is used for arc ion plating (AIP) or high-power pulsed magnetron sputtering (HiPIMS) coating, and the AlCrSiBNiN nanocomposite functional layer is deposited on the AlCrN layer.

[0047] It can be understood that, in the above-mentioned preparation method, single arc ion plating (AIP) equipment or high-power pulse magnetron sputtering (HiPIMS) can be used for preparation, and arc ion plating (AIP) and high-power pulse magnetron sputtering can also be used. (HiPIMS) composite device was prepared. By making full use of the advantages of their respective technologies, it is easier to prepare a ha...

Embodiment 1

[0065] This embodiment provides an AlCrSiBNiN nanocomposite coating, which is composed of a transition layer formed by an AlCrN layer and an AlCrSiBNiN nanocomposite functional layer. Wherein the atomic percentage content of each element in the AlCrN layer is: 30% Al, 18% Cr and 52% N; the atomic percentage content of each element in the AlCrSiBNiN layer is: Al is 21%, Cr is 12%, Si is 6%, B is 7%, Ni is 4%, and N is 50%.

[0066] Put the polished YG6 cemented carbide substrate into the ultrasonic cleaning machine, then ultrasonically clean it with acetone and alcohol for 15 minutes, then dry it with hot air and put it into the vacuum chamber of the coating equipment; vacuumize the vacuum chamber of the coating equipment to make the back The bottom vacuum reaches 5.0×10 -3 Below Pa; turn on the heater in the vacuum chamber to raise the temperature in the vacuum chamber to 540°C; then pass in argon, adjust the air pressure to 0.6Pa, turn on the bias power of the workpiece turr...

Embodiment 2

[0069] This embodiment provides an AlCrSiBNiN nanocomposite coating, which is composed of a transition layer formed by an AlCrN layer and an AlCrSiBNiN nanocomposite functional layer. Wherein the atomic percentage content of each element in the AlCrN layer is: 33% Al, 15% Cr and 52% N; the atomic percentage content of each element in the AlCrSiBNiN layer is: Al is 20%, Cr is 15%, Si is 4%, B is 2%, Ni is 9%, and N is 50%.

[0070]Put the polished YW2 cemented carbide substrate into the ultrasonic cleaning machine, then use acetone and alcohol to ultrasonically clean it for 15 minutes, then dry it with hot air and put it into the vacuum chamber of the coating equipment; vacuumize the vacuum chamber of the coating equipment to make the back The bottom vacuum reaches 5.5×10 -3 Below Pa; turn on the heater in the vacuum chamber to raise the temperature in the vacuum chamber to 560°C; then pass in argon gas, adjust the air pressure to 0.3Pa, turn on the bias power of the workpiece...

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Abstract

The invention relates to an AlCrSiBNiN nano-composite coating as well as a preparation method and application thereof. The AlCrSiBNiN nano-composite coating comprises an AlCrN layer arranged on a substrate, an AlCrSiBNiN layer arranged on the substrate, and an AlCrSiBNiN nano-composite functional layer arranged on the AlCrN layer. The AlCrN layer comprises the following elements in percentage by atom: 30%-35% of Al, 15%-20% of Cr and 48%-52% of N; and the AlCrSiBNiN nano-composite functional layer comprises the following elements in percentage by atom: 20%-30% of Al, 10%-20% of Cr, 2%-15% of Si, 2%-10% of B, 1%-10% of Ni and 45%-55% of N. The AlCrSiBNiN nano-composite coating further has excellent fracture toughness and high-temperature lubricating property on the premise of keeping relatively high hardness and good high-temperature oxidation resistance.

Description

technical field [0001] The invention relates to the technical field of surface protection, in particular to an AlCrSiBNiN nanocomposite coating and a preparation method and application thereof. Background technique [0002] With the development of tool cutting processing technology, higher requirements are put forward for tool materials and performance. Dry, high-speed and high-precision cutting has become an important direction for the development of tool cutting. Depositing a hard coating on the surface of the tool has become an important way to improve and enhance the cutting performance of the tool. [0003] AlCrN is a ternary nitride hard coating used in traditional methods. Due to its high hardness, high wear resistance and high temperature oxidation resistance, it has been successfully applied in cutting tools and other fields, greatly improving the cutting performance and use of tools. life. However, the use temperature of AlCrN is generally around 900°C, and the d...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/32C23C14/02C23C14/35
CPCC23C14/0641C23C14/325C23C14/0021C23C14/0036C23C14/022C23C14/024
Inventor 林海天李立升郑礼伟陈松杨恺
Owner 广东华升纳米科技股份有限公司
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