tialsibnin nanocomposite coating and preparation method and application thereof
A nano-composite coating and nano-composite technology, applied in the coating, metal material coating process, vacuum evaporation plating and other directions, can solve the problem of easy film collapse of coated tools, poor fracture toughness of coatings, and inability to increase coating thickness. Thickness etc.
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[0044] The present invention also provides a method for preparing the above-mentioned TiAlSiBNiN nanocomposite coating, comprising the following steps:
[0045] In an atmosphere containing nitrogen, an arc ion plating (AIP) film was performed on a TiAl alloy target, and a TiAlN layer was deposited on the substrate;
[0046] In an atmosphere containing nitrogen, a TiAlSiBNi alloy target is used for arc ion plating (AIP) or high-power pulsed magnetron sputtering (HiPIMS) coating, and a TiAlSiBNiN nanocomposite functional layer is deposited on the TiAlN layer.
[0047] Understandably, in the above preparation method, a single arc ion plating (AIP) equipment or a high-power pulsed magnetron sputtering (HiPIMS) can be used for preparation, or an arc ion plating (AIP) equipment and a high-power pulsed magnetron sputtering can be used. prepared using HiPIMS composite equipment. By making full use of the advantages of their respective technologies, it is easier to prepare a hard coat...
Embodiment 1
[0065] This embodiment provides a TiAlSiBNiN nanocomposite coating, which is composed of a transition layer formed by a TiAlN layer and a TiAlSiBNiN nanocomposite functional layer. The atomic percentage content of each element in the TiAlN layer is: Ti: 16%, Al: 33%, N: 51%; the atomic percentage content of each element in the TiAlSiBNiN layer is: Ti is 11%, Al is 21%, and Si is 7%, B is 6%, Ni is 4%, and N is 51%.
[0066] Put the polished YW2 cemented carbide substrate into the ultrasonic cleaning machine, then ultrasonically clean it with acetone and alcohol for 15 minutes in turn, then dry it with hot air and put it into the vacuum chamber of the coating equipment; vacuumize the vacuum chamber of the coating equipment to make the back Bottom vacuum reaches 5.0×10 -3 Below Pa; turn on the vacuum chamber heater to raise the temperature in the vacuum chamber to 540°C; then pass argon gas, adjust the air pressure to 0.6Pa, turn on the bias power supply of the workpiece turnta...
Embodiment 2
[0069] This embodiment provides a TiAlSiBNiN nanocomposite coating, which is composed of a transition layer formed by a TiAlN layer and a TiAlSiBNiN nanocomposite functional layer. The atomic percentage content of each element in the TiAlN layer is: Ti: 20%, Al: 29%, N: 51%; the atomic percentage content of each element in the TiAlSiBNiN layer is: Ti is 15%, Al is 20%, and Si is 6%, B is 3%, Ni is 5%, and N is 51%.
[0070]Put the polished YG8 cemented carbide substrate into the ultrasonic cleaning machine, then ultrasonically clean it with acetone and alcohol for 15 minutes in turn, then dry it with hot air and put it into the vacuum chamber of the coating equipment; vacuumize the vacuum chamber of the coating equipment to make the back Bottom vacuum reaches 5.5×10 -3 Below Pa; turn on the vacuum chamber heater to raise the temperature in the vacuum chamber to 540°C; then pass argon gas, adjust the air pressure to 0.3Pa, turn on the bias power supply of the workpiece turntab...
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