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TiAlSiBNiN nano-composite coating as well as preparation method and application thereof

A nano-composite coating and nano-composite technology, applied in the coating, metal material coating process, vacuum evaporation coating and other directions, can solve the problems of reduced tool life, the thickness of the coating cannot be thickened, and the fracture toughness of the coating is poor.

Active Publication Date: 2021-11-16
广东华升纳米科技股份有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the fracture toughness of this type of nanocrystalline / amorphous composite structure coating is poor, and the coating tool is easy to collapse during use, the coating thickness cannot be thickened, and the coating is easy to contact with the processed material at high temperature. Reaction occurs and adhesion occurs, which significantly reduces tool life

Method used

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preparation example Construction

[0044] The present invention also provides a preparation method of the above-mentioned TiAlSiBNiN nanocomposite coating, comprising the steps of:

[0045] In an atmosphere containing nitrogen, an arc ion plating (AIP) film is performed on a TiAl alloy target, and a TiAlN layer is deposited on the substrate;

[0046] In an atmosphere containing nitrogen, the TiAlSiBNi alloy target is used for arc ion plating (AIP) or high-power pulsed magnetron sputtering (HiPIMS) coating, and a TiAlSiBNiN nanocomposite functional layer is deposited on the TiAlN layer.

[0047] It can be understood that, in the above-mentioned preparation method, single arc ion plating (AIP) equipment or high-power pulse magnetron sputtering (HiPIMS) can be used for preparation, and arc ion plating (AIP) equipment and high-power pulse magnetron sputtering can also be used. Injection (HiPIMS) composite equipment was prepared. By making full use of the advantages of their respective technologies, it is easier to...

Embodiment 1

[0065] This embodiment provides a TiAlSiBNiN nanocomposite coating, which is composed of a transition layer formed by a TiAlN layer and a TiAlSiBNiN nanocomposite functional layer. Among them, the atomic percentage content of each element in the TiAlN layer is: Ti: 16%, Al: 33%, N: 51%; the atomic percentage content of each element in the TiAlSiBNiN layer is: Ti is 11%, Al is 21%, Si is 7%, B is 6%, Ni is 4%, and N is 51%.

[0066] Put the polished YW2 cemented carbide substrate into the ultrasonic cleaning machine, then use acetone and alcohol to ultrasonically clean it for 15 minutes, then dry it with hot air and put it into the vacuum chamber of the coating equipment; vacuumize the vacuum chamber of the coating equipment to make the back The bottom vacuum reaches 5.0×10 -3 Below Pa; turn on the heater in the vacuum chamber to raise the temperature in the vacuum chamber to 540°C; then pass in argon, adjust the air pressure to 0.6Pa, turn on the bias power of the workpiece t...

Embodiment 2

[0069] This embodiment provides a TiAlSiBNiN nanocomposite coating, which is composed of a transition layer formed by a TiAlN layer and a TiAlSiBNiN nanocomposite functional layer. Among them, the atomic percentage content of each element in the TiAlN layer is: Ti: 20%, Al: 29%, N: 51%; the atomic percentage content of each element in the TiAlSiBNiN layer is: Ti is 15%, Al is 20%, and Si is 6%, B is 3%, Ni is 5%, and N is 51%.

[0070]Put the polished YG8 cemented carbide substrate into the ultrasonic cleaning machine, then ultrasonically clean it with acetone and alcohol for 15 minutes, then dry it with hot air and put it into the vacuum chamber of the coating equipment; vacuumize the vacuum chamber of the coating equipment to make the back The bottom vacuum reaches 5.5×10 -3 Below Pa; turn on the heater in the vacuum chamber to raise the temperature in the vacuum chamber to 540°C; then pass in argon, adjust the air pressure to 0.3Pa, turn on the bias power of the workpiece ...

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Abstract

The invention relates to a TiAlSiBNiN nano-composite coating as well as a preparation method and application thereof. The TiAlSiBNiN nano-composite coating comprises a TiAlN layer arranged on a substrate, and a TiAlSiBNiN nano-composite functional layer arranged on the TiAlN layer. The TiAlN layer comprises the following elements in percentage by atom: 25%-35% of Al, 15%-25% of Ti and 45%-55% of N; and the TiAlSiBNiN nano-composite functional layer comprises the following elements in percentage by atom: 20%-30% of Al, 10%-20% of Ti, 2%-15% of Si, 1%-10% of B, 1%-10% of Ni and 45%-55% of N. The TiAlSiBNiN nano-composite coating also has excellent fracture toughness and high-temperature lubricating property on the premise of keeping relatively high hardness and good high-temperature oxidation resistance.

Description

technical field [0001] The invention relates to the technical field of surface protection, in particular to a TiAlSiBNiN nanocomposite coating and a preparation method and application thereof. Background technique [0002] With the development of tool cutting processing technology, higher requirements are put forward for tool materials and performance. Dry, high-speed and high-precision cutting has become an important direction for the development of tool cutting. Depositing a hard coating on the surface of the tool has become an important way to improve and enhance the cutting performance of the tool. [0003] TiAlN is a ternary nitride hard coating used in traditional methods. Due to its high hardness, high wear resistance and high temperature oxidation resistance, it has been successfully applied in cutting tools and other fields, greatly improving the cutting performance and use of tools. life. However, the use temperature of TiAlN is generally around 750°C to 850°C, a...

Claims

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Application Information

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IPC IPC(8): C23C14/06C23C14/32C23C14/35C23C14/02
CPCC23C14/0641C23C14/0688C23C14/325C23C14/3485C23C14/35C23C14/0021C23C14/0036C23C14/345C23C14/022
Inventor 林海天李立升郑礼伟陈松杨恺
Owner 广东华升纳米科技股份有限公司
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