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Chamfering machine

A chamfering machine and chamfering technology, which is applied in the field of chamfering machines, can solve the problems of unstable grinding wheel grinding and silicon wafer grinding effect, and achieve the effects of convenient chamfering and grinding process, improving work efficiency and convenient maintenance

Inactive Publication Date: 2021-09-07
郑六奎
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, when the silicon wafer chamfering machine is chamfering the silicon wafer, because the shaft driving the grinding wheel will vibrate due to high-speed rotation, it is easy to cause the grinding wheel to be unstable when grinding the silicon wafer, making the grinding effect of the silicon wafer unstable. Even worse, therefore, the existing technology still needs to be improved

Method used

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  • Chamfering machine
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Examples

Experimental program
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Embodiment

[0033] Please refer to Figure 1 to Figure 5, as shown in this embodiment, a chamfering machine is provided, which includes a frame 100, a working box 200, a chamfering assembly 300, a centering assembly 400, an object loading assembly 500 and a sliding assembly 600 are arranged in the frame 100; The box 200 is used to provide installation stations for some components and to collect debris generated when polishing silicon wafers, making the collection and processing of silicon chips more convenient. The working box 200 is a rectangular box; the chamfering component 300 is installed in the working box 200 The outer wall is between the frame 100 and the outer wall of the working box 200, which makes the maintenance of the chamfering assembly 300 more convenient, and also prevents silicon chips from entering the structure of the chamfering assembly 300, causing damage to the chamfering assembly 300; The object assembly 500 includes an object stage 510 and an elevating table 520 c...

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Abstract

The invention provides a chamfering machine, and relates to the technical field of chamfering equipment. The chamfering machine comprises a rack, wherein a working box, a chamfering assembly, a centering assembly, a carrying assembly and a sliding assembly are arranged in the rack, the chamfering assembly is installed on the outer wall of the working box, the carrying assembly comprises a carrying table and a lifting table which are connected with each other, the lifting table is connected with the sliding assembly, the sliding assembly is connected with the rack and located outside the working box, the carrying table is located in the working box and provided with a first motor and a vacuum adsorption table used for adsorbing materials, and the output end of the first motor is connected with the vacuum adsorption table through a gear transmission pair, and the beneficial effects of being stable in work and good in grinding effect are achieved.

Description

technical field [0001] The invention relates to the technical field of silicon wafer chamfering equipment, in particular to a chamfering machine. Background technique [0002] Silicon is a very typical semiconductor material. Its content on the earth’s surface is second only to oxygen. It is widely used in diodes, triodes, thyristors, field effect transistors and various integrated circuits, aerospace, optical fiber and other fields. , is a very important material. During the processing of silicon wafers, if the silicon wafers are cut from the silicon ingot, if the wafers are directly ground, it is easy to cause edge chipping, which will cause the silicon wafers to be scrapped. Therefore, it is necessary to chamfer the silicon wafers before grinding the wafers. [0003] At present, when the silicon wafer chamfering machine is chamfering the silicon wafer, because the shaft driving the grinding wheel will vibrate due to high-speed rotation, it is easy to cause the grinding w...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B9/06B24B41/06B24B55/02B24B55/06B24B41/02B24B55/00
CPCB24B9/065B24B41/068B24B55/02B24B55/06B24B41/02B24B55/00
Inventor 郑六奎
Owner 郑六奎
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