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a tio 2 /ps colloidal photonic crystal and its preparation method and application in humidity sensor

A colloidal photonic crystal, humidity sensor technology, applied in crystal growth, chemical instruments and methods, color/spectral property measurement, etc., to achieve the effects of improving optical properties, good sensing performance, and increasing effective refractive index

Active Publication Date: 2022-06-07
NANJING NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

TiO 2 Study on the formation of two-dimensional colloidal photonic crystals deposited on a single-layer PS microsphere film

Method used

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  • a tio <sub>2</sub> /ps colloidal photonic crystal and its preparation method and application in humidity sensor
  • a tio <sub>2</sub> /ps colloidal photonic crystal and its preparation method and application in humidity sensor
  • a tio <sub>2</sub> /ps colloidal photonic crystal and its preparation method and application in humidity sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Example 1 TiO 2 Preparation of / PS Colloidal Photonic Crystals

[0033] Step 1: Microfluidic injection to prepare PS colloidal crystal monolayers

[0034] The 690nm PS microspheres, absolute ethanol, and n-butanol were subjected to ultrasonic oscillation in a volume ratio of 2:1:1 to form a PS microsphere suspension. The liquid surface forms a single-layer PS microsphere film.

[0035] The single-layer PS microsphere film exhibits different colors at different angles due to its unique periodic arrangement under the illumination of white light.

[0036] Step 2: Reactive Ion Etching

[0037] By lifting the substrate, the single-layer PS microsphere film is transferred to the target substrate (silicon wafer) as a reactive ion etching mask, and the O 2 For the reaction gas, the etching radio frequency power is 15W, the oxygen flow rate is 30sccm, the reaction chamber pressure is 2Pa, and the etching time is 0min.

[0038] like figure 2 As shown, the single-layer PS m...

Embodiment 2

[0041] Example 2 TiO 2 Preparation of / PS Colloidal Photonic Crystals

[0042] The difference from Example 1 is that the etching time in Step 2 is 1 min.

[0043] like image 3As shown, the single-layer PS microsphere film on the PS mask is a periodic hexagonal close-packed microsphere film, the diameter of the microspheres is 670 nm, the overall cracks and defects are few, and the assembly effect is good.

[0044] like Figure 4 As shown, the TiO prepared after etching for 1 min 2 / PS colloidal photonic crystal, the microsphere gap is enlarged, and the surface and gap of the microsphere are covered with TiO 2 film.

Embodiment 3

[0045] Example 3 TiO 2 Preparation of / PS Colloidal Photonic Crystals

[0046] The difference from Example 1 is that the etching time in Step 2 is 2 min.

[0047] like Figure 5 As shown, the single-layer PS microsphere film on the PS mask plate is a periodic hexagonal close-packed microsphere film, the diameter of the microspheres is 640 nm, the overall cracks and defects are few, and the assembly effect is good.

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Abstract

The invention discloses a TiO 2 / PS colloidal photonic crystal and its preparation method and application in humidity sensor, TiO 2 / PS colloidal photonic crystals include PS single-layer microsphere film and TiO deposited on its upper surface 2 film, the diameter of the microspheres in the PS single-layer microsphere film is 610~690nm, and the TiO 2 / PS colloidal photonic crystals are arranged in a periodic hexagonal spherical shell array; through a combination of microfluidic injection, reactive ion etching, and magnetron sputtering, TiO is deposited on a single-layer PS microsphere film 2 thin films to form size-controllable TiO 2 / PS colloidal photonic crystal; TiO 2 / PS colloidal photonic crystal combined with TiO 2 Humidity sensitive properties and TiO 2 The optical characteristics and periodic spherical shell array structure characteristics of / PS colloidal photonic crystals are applied to optical humidity sensors, and the reflection peak position deviation is correlated with relative humidity for humidity detection.

Description

technical field [0001] The invention belongs to the field of colloidal photonic crystals, in particular to a kind of TiO 2 / PS colloidal photonic crystal and its preparation method and application in humidity sensor. Background technique [0002] Due to its special periodic structure, colloidal photonic crystals have the characteristic of photonic band gap, so that light of a specific frequency can be regulated, and its applications cover many fields such as light, electricity, catalysis, sensing, display, detection and so on. The width and position of the photonic forbidden band of the colloidal photonic crystal can be adjusted by the lattice parameters of the photonic crystal and the refractive index of the medium. However, existing artificial colloidal photonic crystals are mainly based on silicon dioxide (SiO 2 ) and polystyrene (PS) and other polymer microspheres, the limited types of colloidal microspheres and the difficulty of colloidal self-assembly to accurately c...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C30B25/06C30B25/18C30B29/58G01N21/25G01N21/41G01N21/47
CPCC30B29/58C30B25/06C30B25/186G01N21/25G01N21/41G01N21/4738G01N21/474G01N2021/4742
Inventor 王鸣邓亚利李梅郝辉夏巍郭冬梅
Owner NANJING NORMAL UNIVERSITY
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