A kind of flexible tactile sensor with multi-layer structure and its manufacturing method

A tactile sensor, multi-layer structure technology, applied in the direction of instruments, piezoelectric/electrostrictive/magnetostrictive devices, measuring force, etc., can solve the problems of easy generation of gaps in the electrode layer and low sensitivity, and achieve good extensibility , good adhesion strength, and the effect of preventing cracks

Active Publication Date: 2020-06-26
江阴智产汇知识产权运营有限公司
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AI Technical Summary

Problems solved by technology

The traditional dielectric layer is filled with solid or gas, but gaps are easily generated between the electrode layers, and the sensitivity is low; in recent years, new materials and structures have been applied to the electrode layer, which has greatly improved the performance of the tactile sensor. Huang Ying et al. (Chinese Patent Application No.: 201410206998.0) provide a tactile sensor using PDMS as a dielectric layer; a new tactile sensor; such as figure 1 It is a typical multi-layer structure, from top to bottom are the upper electrode layer, upper electrode, dielectric layer, lower electrode and lower electrode layer

Method used

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  • A kind of flexible tactile sensor with multi-layer structure and its manufacturing method
  • A kind of flexible tactile sensor with multi-layer structure and its manufacturing method

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preparation example Construction

[0017] A kind of flexible tactile sensor preparation method of multilayer structure of the present invention comprises the following steps:

[0018] 1. Preparation of Ag electrodes;

[0019] 2. Preparation of PDMS film;

[0020] 3. Preparation of AuNPs-PDMS thin film;

[0021] 4. Preparation of PI film;

[0022] 5. Assemble the capacitive sensor.

Embodiment 1

[0024] 1. Manufacture the upper and lower capacitor electrodes through the magnetron sputtering process; 1: At room temperature, turn on the power supply, open the inflation valve, open the cavity to place the PET film, close the cavity, and close the inflation valve. The target used is a silver target. Two: Turn on the vacuum gauge, mechanical pump, and solenoid valve to pump for 30 seconds, turn on the molecular pump, and turn off the solenoid valve. Turn on the circulating water, open the V1 valve to pump to below 20Pa, open the Ar valve, pump to below 4.0Pa, and close the V1 valve. Three: Open the Ar cylinder and switch the molecular pump. Turn off the vacuum gauge, turn on the flow display, and adjust the valve control to 14 sccm. Four: Close the small G valve, adjust the pressure: 2.2Pa, open the target baffle. Turn on the RF power, turn on the stepping electrodes, and go forward. Five: Pre-sputter for 2 minutes, wait for the parameters to stabilize, adjust the G valv...

Embodiment 2

[0030] 1. Manufacture the upper and lower capacitor electrodes through the magnetron sputtering process; 1: At room temperature, turn on the power supply, open the inflation valve, open the cavity to place the PET film, close the cavity, and close the inflation valve. Two: Turn on the vacuum gauge, mechanical pump, and solenoid valve to pump for 30 seconds, turn on the molecular pump, and turn off the solenoid valve. Turn on the circulating water, open the V1 valve to pump to below 20Pa, open the Ar valve, pump to below 4.0Pa, and close the V1 valve. Three: Open the Ar cylinder and switch the molecular pump. Turn off the vacuum gauge, turn on the flow display, and adjust the valve control to 14 sccm. Four: Close the small G valve, adjust the pressure: 2.2Pa, open the target baffle. Turn on the RF power, turn on the stepping electrodes, and go forward. Five: Pre-sputter for 2 minutes, wait for the parameters to stabilize, adjust the G valve, the pressure: 0.5Pa. Non-magnetr...

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Abstract

The invention relates to the technical field of flexible artificial electronic skin, in particular to a flexible tactile sensor with a multi-layer structure as well as a manufacturing method thereof.A structure with double dielectric layers is developed; an AuNPs-PDMS composite film is prepared by a simpler and more environment-friendly mode; and upper and lower electrode layers adopt PET materials with higher cohesive property with metal, an Ag electrode is prepared by using MEMS on a PET film, and a novel flexible tactile sensor is obtained through improvement on the materials and the structure.

Description

technical field [0001] The invention relates to the technical field of flexible artificial electronic skin, in particular to a flexible tactile sensor with a multi-layer structure and a manufacturing method thereof. Background technique [0002] Flexible artificial electronic skin is a new type of wearable flexible bionic tactile sensor, which can imitate the human tactile perception function. It uses a tactile sensing unit made of extensible materials and structures to more accurately perceive different Pressure, temperature, humidity and other external stimuli, so it can be used as an important application component in the new generation of medical equipment, human prosthetics and robot skin; under the action of tensile stress, it is difficult for traditional tactile sensors to have both high flexibility and good performance. Electronic semiconductor performance; although through the unremitting efforts of many scientific researchers, the sensitivity, flexibility, and duct...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/047G01L1/14
CPCG01L1/142
Inventor 郭立强胡永斌李可丁建宁程广贵
Owner 江阴智产汇知识产权运营有限公司
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