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Textured piezoelectric ceramic laminated driver and preparation method thereof

A technology of piezoelectric ceramics and drivers, which is applied in the field of piezoelectric ceramic devices and can solve problems such as high driving voltage, low piezoelectric performance, and large strain hysteresis

Inactive Publication Date: 2021-05-04
XI AN JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a textured piezoelectric ceramic laminated driver and its preparation method, which solves the problems of low piezoelectric performance, high driving voltage and low driving displacement in the prior art of using piezoelectric ceramics to prepare laminated drivers And the defect of large strain hysteresis

Method used

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  • Textured piezoelectric ceramic laminated driver and preparation method thereof
  • Textured piezoelectric ceramic laminated driver and preparation method thereof
  • Textured piezoelectric ceramic laminated driver and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0058] In Example 1, the lead-based ceramic base powder of PMN-30PT component is selected, and the powder is obtained by two-step solid-phase synthesis, that is, MgO and Nb 2 o 5 Synthesis of MgNb 2 o 6 , then Pb 3 o 4 , MgNb 2 o 6 and TiO 2 After fully mixing, pre-fire at 850°C for 2 hours, and the sintering aid is CuO. In the casting formula: the solvent is a binary azeotropic solvent of butanone and absolute ethanol, the binder is PVB, the dispersant is glycerol trioleate, the plasticizer is polyethylene glycol and dibutyl phthalate, Sintered textured ceramics d 33 It is 790-860pC / N. The specific production steps are as follows:

[0059] Step 1: Weigh the raw materials according to the chemical formula ratio, and obtain PMN-30PT ceramic powder by ball milling, drying, and pre-sintering at 850°C for 2 hours; prepare and wash pure BaTiO by two-step topochemical method 3 (BT) sheet template;

[0060] Step 2: Take 30g of the above-mentioned ceramic matrix powder, mi...

Embodiment 2

[0066] In Example 2, lead-based PZT-15SKN is used as the dielectric material of the textured laminated piezoelectric actuator, and its molecular formula is 0.85Pb (Zr 0.52 Ti 0.48 -0.15Sr(K 0.25 Nb 0.75 )O 3 , the template grain growth technique (TGG) is used in the process to prepare textured piezoelectric ceramics, adding Li 2 CO 3 As a sintering aid, in the casting formula: the solvent is a binary azeotropic solvent of xylene and absolute ethanol, the binder is PVB, the dispersant is phosphate, and the plasticizer is polyethylene glycol and dibutyl phthalate Esters, the highest texture degree of sintered textured ceramics is 97.1%. Specific steps are as follows:

[0067] Step 1: Preparation of fine-grained piezoelectric ceramic matrix by solid-state method: PbO, TiO 2 , SrCO 3 、K 2 CO 3 After ball milling with absolute ethanol for 24 hours, it was dried, and then calcined at 850°C for 4 hours.

[0068] Pure BaTiO was prepared by two-step topological chemistry an...

Embodiment 3

[0075] In Example 3, lead-based 17PIN-38PSN-45PT is used as the dielectric material of the textured laminated piezoelectric driver, and its molecular formula is 0.17Pb(In 1 / 2 Nb 1 / 2 )O 3 -0.38Pb(Sc 1 / 2 Nb 1 / 2 )O 3 -0.45PbTiO 3 In the process, the template grain growth technology (TGG) is used to prepare textured piezoelectric ceramics, and CuO is added as a sintering aid. In the casting formula: the solvent is a binary azeotrope of methyl ethyl ketone and absolute ethanol. The agent is PVB, the dispersant is melted herring oil, the plasticizer is polyalkylene glycol and butyl benzyl phthalate, the highest texture degree of sintered ceramics is 98.8%, and its XRD pattern is as follows: image 3 shown, d 33 It is 1000pC / N. The specific production steps are as follows:

[0076] Step 1: This example mixes In according to the chemical formula ratio 2 o 3 and Nb 2 o 5 、Sc 2 o 3 and Nb 2 o 5 Synthesis of pure-phase InNbO separately by solid-phase synthesis 4 (IN), Sc...

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Abstract

The invention provides a textured piezoelectric ceramic laminated driver and a preparation method thereof, and the method comprises the following steps: 1, preparing a ceramic thick film through a fine-grain piezoelectric ceramic substrate and a sheet-shaped template, cutting the obtained ceramic thick film into a square sheet structure with a preset size, and brushing an electrode on one surface of the ceramic thick film with the square sheet structure, to obtain ceramic thick films brushed with inner electrodes; 2, stacking the obtained ceramic thick films brushed with the inner electrodes according to an electrode staggering mode to obtain a ceramic piezoelectric stack; 4, carrying out glue discharging and sintering on the obtained ceramic piezoelectric stack in sequence to obtain a sintered ceramic piezoelectric stack; and 5, performing electrode receiving and polarization on the two side surfaces of the obtained sintered ceramic piezoelectric stack in sequence to obtain the textured lead-based piezoelectric laminated driver. The anisotropic ceramic is obtained through directional growth of the fine-grain piezoelectric ceramic matrix around the flaky template, so that the piezoelectric property of the ceramic is greatly improved.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric ceramic devices, in particular to a textured piezoelectric ceramic laminate driver and a preparation method thereof. Background technique [0002] Piezoelectric ceramics are piezoelectric functional materials that can convert electrical energy and mechanical energy, and are widely used in sensors, transducers, and drivers. Among them, piezoelectric actuators are used in many fields such as machinery industry, precision instruments, biomedicine, optics, aerospace, robotics, etc. due to their fast response speed, large driving force, and low power consumption. In recent years, with the continuous development of science and technology, the demand for piezoelectric actuators with small volume, large strain, large displacement and low driving voltage is very urgent. At present, lead zirconate titanate (PZT) based piezoelectric ceramics is the main piezoelectric material for making laminated piez...

Claims

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Application Information

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IPC IPC(8): C04B35/472C04B35/491C04B35/622C04B35/64
CPCC04B35/472C04B35/491C04B35/622C04B35/64C04B2235/3201C04B2235/3206C04B2235/3224C04B2235/3255C04B2235/3286C04B2235/6026C04B2235/6567
Inventor 李飞刘金凤杨帅王明文乔辽邱超锐高翔宇李景雷徐卓
Owner XI AN JIAOTONG UNIV
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