Lamb wave resonator with POI structure
A Lamb wave resonator and resonator technology, applied in the field of mobile phone radio frequency, can solve problems such as stray effects, affect the performance of the resonator, reduce the Q value, etc., and achieve the effect of high electromechanical coupling coefficient
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[0048] The present invention will be described in detail below in conjunction with the accompanying drawings, and the features of the present invention will be further revealed in the following detailed description.
[0049] figure 1 It is a schematic diagram of the structure of a surface acoustic wave interdigital transducer (IDT). Such as figure 1 As shown in , on the surface of the piezoelectric substrate, deposit a layer of metal film, and then use the photolithography method in the semiconductor planar process to obtain a set of comb-shaped intersecting metal electrodes. These metal electrodes shaped like human fingers are intersected with each other, and bus bars at both ends are connected together to form two stages of the device, thereby obtaining an interdigital transducer. exist figure 1 In the example of , a total of 6 metal electrodes labeled 1-6 are shown, indicating that the number of interdigital electrodes of this IDT is 6, and the electrodes with odd number...
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