All-dielectric transmission type efficient ultrathin beam splitter and preparation method and application thereof

Abstract

The invention discloses an all-dielectric transmission type efficient ultrathin beam splitter and a preparation method and application thereof. A beam splitter comprises a plurality of structural unitarrays, wherein each structural unit comprises: a substrate made of a transparent dielectric material; a dielectric functional layer which is made of a high-refractive-index transparent dielectric material, is arranged on the substrate and comprises a periodic nano-pillar array structure that comprises a limited number of pillars which are periodically and alternately arranged and have differentdiameters, wherein the arrangement rule of the limited number of cylinders with relatively large diameters and the limited number of cylinders with relatively small diameters conforms to the generalized Snell's Law. The beam splitter has excellent beam splitting performance, can split normally incident visible light into two beams of emergent light, and has the advantages of being high in transmission efficiency, wide in wave band, ultrathin, light, easy to integrate, low in power consumption, low in cost and relatively easy to manufacture. The beam splitter has application prospects in the fields such as an optical sensing system, a nanometer photonic device and an integrated optical system.

Description

technical field [0001] The invention relates to a beam splitter, in particular to a full-dielectric transmission type high-efficiency ultra-thin beam splitter and its preparation method and application, belonging to the technical field of optical element preparation. Background technique [0002] A beam splitter is an optical component that splits a light beam into two or more, and is widely used in photonic circuit systems, optical display systems, and optical processing systems. The most common beamsplitter is a cube beamsplitter made from two triangular glass prisms glued together on a substrate using polyester, epoxy, or polyurethane-based adhesives. The thickness of the resin layer is adjusted so that half of the light (of a certain wavelength) incident through one "port" (ie, the face of the cube) is reflected and the other half is transmitted on due to total internal reflection. Polarizing beam splitters, such as Wollaston prisms, use birefringent materials to split ...

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Problems solved by technology

But it needs to use 700nm thick material, which is very difficult to prepare

In the same year, Zhang Xingliang and others proposed a reflective beam splitter based on metal-dielectric-metal, which can split a single-frequency, single-polarized incident light into two beams of outgoing light, but its efficiency is less than 20%.

Due to the limitations of the inherent loss of the material and the difficulty of design, it is still a challenge to design a high-efficiency transmissive single-frequency, single-polarization beam splitter suitable for the visible light band.

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