Flexible tunable beam splitter and preparation method thereof

A beam splitter and flexible technology, applied in the field of flexible tunable beam splitter and its preparation, can solve problems such as restricting the market promotion and application of beam splitters, cumbersome preparation process, large technical resources, etc., and achieve excellent electrical regulation performance, Wide source of raw materials and easy preparation

Active Publication Date: 2022-08-02
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, the existing technology for preparing beam splitters requires a cumbersome preparation process, and requires considerable technical resources, financial resources, and time costs
This largely restricts the marketing and application of beam splitters

Method used

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  • Flexible tunable beam splitter and preparation method thereof
  • Flexible tunable beam splitter and preparation method thereof
  • Flexible tunable beam splitter and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0060] An aspect of the embodiments of the present invention provides a flexible tunable beam splitter based on a metasurface-electrochromic material, which includes an array of structural units, and each structural unit includes:

[0061] Flexible transparent substrate with a thickness of 2μm to 125μm;

[0062] a transparent bottom electrode, which is arranged on a flexible transparent substrate and has a thickness of 50nm to 150nm;

[0063] a metal functional layer, which is arranged on the transparent bottom electrode and includes a periodic nano-column / nano-rod array structure, with a thickness of 120nm-150nm;

[0064] an electrochromic layer, which is arranged on the transparent bottom electrode and coats the side and top surfaces of the metal nanostructure, with a thickness of 2 μm;

[0065] The electrolyte layer, which is arranged on the electrochromic layer, provides a channel for the transport of ions, and has a thickness of 40-60 μm;

[0066] The ion storage layer,...

Embodiment 2

[0094] Another embodiment of the present invention provides the aforementioned method for preparing a flexible tunable beam splitter based on a metasurface-electrochromic material, comprising:

[0095] Step S101, disposing a transparent bottom electrode on the flexible transparent substrate.

[0096] In a specific implementation, the transparent bottom electrode layer is formed on the flexible transparent substrate by using an optical coating technology; and / or the transparent bottom electrode layer is formed on the flexible transparent substrate by using a magnetron sputtering coating technology.

[0097] In step S102, a metal functional layer is provided on the transparent bottom electrode, and a periodic nano-column / nano-rod array structure is formed in the metal functional layer.

[0098] In a specific implementation, the metal functional layer is formed on the transparent bottom electrode by using electron beam evaporation coating technology.

[0099] In a specific imple...

Embodiment 3

[0114] The embodiments of the present invention provide the application of the aforementioned flexible tunable beam splitter based on the metasurface-electrochromic material in the preparation of an optical communication system, a nanophotonic device or an integrated optical system.

[0115] The technical solutions of the present invention will be further clearly and completely explained below with reference to the accompanying drawings and more specific embodiments.

[0116] see figure 1As shown, a flexible tunable beam splitter based on a metasurface-electrochromic material in this embodiment includes gold nanopillars with designed diameters and gold nanopillars formed by alternately arranging gold nanorods in the manner of "AABB" / Nanorod array structure 6, electrochromic layer 5, electrolyte layer 4, ion storage layer 3, transparent top / bottom electrodes 2 / 7, flexible transparent upper / lower substrate 1 / 8. A beam of visible light (632.8 nm) polarized in the X-direction is...

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Abstract

The invention discloses a flexible tunable beam splitter and a preparation method thereof. The flexible tunable beam splitter includes an array of structural units, the structural units include: a flexible transparent substrate; a transparent bottom electrode, disposed on the substrate; an electrochromic layer, disposed on the transparent bottom electrode; a metal functional layer, including a periodic nanopillar or nanorod array structure. The flexible tunable beam splitter and the preparation method thereof have excellent beam splitting performance, low power consumption and low cost, and are easy to produce.

Description

technical field [0001] The invention relates to the technical field of optical element preparation, in particular to a flexible tunable beam splitter and a preparation method thereof. Background technique [0002] In conventional optics, the manipulation of light waves is achieved by light propagating in a medium of a given refractive index, and changes in amplitude, phase, and polarization are accumulated by propagating in the medium, and the associated optical components are bulky and difficult to integrated. The goal of miniaturization and integration in modern industries has promoted the birth and development of micro-nano optics. The boom in metasurfaces in recent years offers a way to overcome the aforementioned limitations. Metasurfaces are ultrathin man-made materials composed of subwavelength-sized arrays of micro-nano structures. Studies have shown that at sub-wavelength size, light will interact with micro-nano structures to generate surface plasmon resonance, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02F1/163G02F1/155G02F1/1516G02F1/153
CPCG02F1/163G02F1/155G02F1/15165G02F1/153G02F2001/164
Inventor 林雨蒋春萍刘峰峰李玉雄隋展鹏
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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