All-dielectric reflection-type efficient ultra-thin beam splitter and preparation method and application thereof

A reflective, all-dielectric technology, used in instruments, optics, optical components, etc., can solve problems such as low average reflectivity, and achieve the effects of high reflection efficiency, low time cost, and wide source of raw materials

Inactive Publication Date: 2019-10-11
SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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  • Description
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  • Application Information

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Problems solved by technology

[0004] However, it is worth noting that their average reflectance is well below 90% between 450-800nm
Due to the inherent loss of materials and the limitation of design difficulty, it is still a challenge to design a high-efficiency beam splitter suitable for the visible light band

Method used

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  • All-dielectric reflection-type efficient ultra-thin beam splitter and preparation method and application thereof
  • All-dielectric reflection-type efficient ultra-thin beam splitter and preparation method and application thereof
  • All-dielectric reflection-type efficient ultra-thin beam splitter and preparation method and application thereof

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preparation example Construction

[0065] Another aspect of the embodiments of the present invention provides a method for preparing the above-mentioned all-dielectric reflection type high-efficiency ultra-thin beam splitter, which includes: alternately stacking high-refractive index dielectric materials and low-refractive index dielectric materials on the substrate to form high-efficiency stacks reflector;

[0066] setting a dielectric transmission layer on the high-efficiency stacked reflector;

[0067]A dielectric functional layer is arranged on the dielectric transmission layer, and a periodic nano-column array structure is formed in the dielectric functional layer.

[0068] Further, the preparation method includes: forming the high-efficiency laminated reflector on the substrate by magnetron sputtering coating technology.

[0069] Further, the preparation method includes: forming the dielectric transmission layer on the high-efficiency stacked reflector by using magnetron sputtering coating technology.

...

Embodiment 1

[0079] see figure 1 As shown, an all-dielectric reflection type high-efficiency ultra-thin beam splitter in this embodiment includes a silicon nano-pillar array structure 1 formed by alternating arrangement of silicon nano-pillars 10 with designed diameters in an "AABB" manner, and a magnesium fluoride dielectric transmission Layer 2, the high-refractive-index silicon dielectric layers 3, 5, and 7 that constitute the high-efficiency stacked reflector with a DBR-like structure, and the low-refractive-index magnesium fluoride dielectric layers 4, 6, and 8 that constitute the high-efficiency stacked reflector with a DBR-like structure, silicon Substrate9. A beam of visible light (450nm-760nm) is vertically incident on the all-dielectric reflection type high-efficiency ultra-thin beam splitter from the top of the device, and is efficiently reflected into two beams of the same visible light. The frequency and polarization direction of the light do not change, that is It is an all-...

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Abstract

The present invention discloses an all-dielectric reflection-type efficient ultra-thin beam splitter and a preparation method and application thereof. The beam splitter comprises a structural unit array, and each structural unit comprises: an efficient laminated reflector, which has a structure based on a distributed Bragg reflection structure; a medium transmission layer, disposed on the efficient laminated reflector; and a medium functional layer, which is disposed on the medium transmission layer, and comprises a periodic nanorod array structure. The beam splitter provided in the present invention has excellent beam splitting performance, can split normally incident visible light into two beams of emergent light, has characteristics of being high in efficiency, wide in wave band, simplein structure, ultra-thin, lightweight and easy for integration, low in power consumption and costs, and relatively easy for production, and has great application value in an optical sensing system, an advanced nano-photonic device and an integrated optic system.

Description

technical field [0001] The invention relates to a beam splitter, in particular to a full-dielectric reflection type high-efficiency ultra-thin beam splitter and its preparation method and application, belonging to the technical field of optical element preparation. Background technique [0002] A beam splitter is an optical component that splits a light beam into two or more, and is widely used in photonic circuit systems, optical display systems, and optical processing systems. The most common beamsplitter is a cube beamsplitter made from two triangular glass prisms glued together on a substrate using polyester, epoxy, or polyurethane-based adhesives. The thickness of the resin layer is adjusted so that half of the light (of a certain wavelength) incident through one "port" (ie, the face of the cube) is reflected and the other half is transmitted on due to total internal reflection. Polarizing beam splitters, such as Wollaston prisms, use birefringent materials to split li...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B27/14G02B5/08
CPCG02B5/0816G02B27/14
Inventor 蒋春萍李玉雄谷承艳隋展鹏刘峰峰
Owner SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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