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Surface acoustic wave gas sensor based on two-dimensional phonon crystal reflecting grating

A two-dimensional phononic crystal and gas sensor technology, which is used in material analysis, instruments, and scientific instruments using sonic/ultrasonic/infrasonic waves. big effect

Inactive Publication Date: 2012-12-26
XINJIANG QIUSHI INFORMATION TECH
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Problems solved by technology

Among them, the surface acoustic wave resonator has the characteristics of high quality factor, low loss and good frequency stability, but the multiple reflections of the sound wave and the influence of the film material on the sound wave absorption are much greater than the delay line type, resulting in the detection of the sensor Instability (see He Shitang et al., Instrument Technology and Sensors, 2009, Supplement: 117-120)

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  • Surface acoustic wave gas sensor based on two-dimensional phonon crystal reflecting grating

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Embodiment Construction

[0016] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0017] As mentioned above, the use of two-dimensional phononic crystal structure to replace the traditional one-dimensional metal bar reflection grid of the surface acoustic resonator device not only improves the omnidirectional reflection coefficient of the surface acoustic wave, but also obtains a more efficient surface acoustic wave resonance device, and also reduces the size of the reflection grid, which is very beneficial to obtain a highly integrated surface acoustic wave resonator device. In view of this point, the present invention proposes a surface acoustic wave gas sensor based on a two-dimensional phononic crystal reflection grid , that is, the two-dimensional phononic crystal composed of gas-sensitive semiconductor metal oxide and air column is used as the reflection grid at both ends of the resonator.

[0018] As shown in the figure, a sur...

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Abstract

The invention provides a surface acoustic wave gas sensor based on a two-dimensional phonon crystal reflecting grating, belonging to a novel gas sensor structure in the technical field of surface acoustic waves. The surface acoustic wave gas sensor based on a two-dimensional phonon crystal reflecting grating adopts a single-ended resonator structure; two-dimensional phonon crystals composed of a gas sensory semiconductor metal oxide and an air column are used as reflecting gratings at the two ends of the resonator; the phonon crystal reflecting grating has double functions of gas sensing and reflection; the two-dimensional air column phonon crystal gas sensor structure has the characteristics of large surface area, high sensitivity and the like; the two-dimensional phonon crystal reflecting grating is higher than the traditional one-dimensional metal strip reflecting grating in reflection efficiency; and meanwhile, the size of the reflecting grating is reduced, thereby being very favorable for obtaining a surface acoustic wave gas sensor with a high integration level.

Description

technical field [0001] The invention relates to a surface acoustic wave gas sensor using a two-dimensional phononic crystal composed of a gas-sensitive semiconductor metal oxide and an air column as a reflection grid at both ends of a resonator to obtain a surface acoustic wave gas sensor device with excellent performance. surface wave technology. Background technique [0002] The surface acoustic wave gas sensor has the characteristics of high precision, strong anti-interference ability, high sensitivity, easy integration, and intelligence, and is widely used in the sensitive detection of different gases such as methanol, acetone, and water vapor (see Sun Lei et al., Dalian University of Technology Master's Thesis, 2005). In 1979, H.Wohltjen and others first reported the chemical vapor sensor based on surface acoustic wave technology. The oscillation frequency of the surface wave oscillator realizes the detection of gas (see Sun Lei et al., Dalian University of Technology...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/024
Inventor 刘勇莫家庆
Owner XINJIANG QIUSHI INFORMATION TECH
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