Surface acoustic wave gas sensor based on two-dimensional phonon crystal reflecting grating
A two-dimensional phononic crystal and gas sensor technology, which is used in material analysis, instruments, and scientific instruments using sonic/ultrasonic/infrasonic waves. big effect
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[0016] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0017] As mentioned above, the use of two-dimensional phononic crystal structure to replace the traditional one-dimensional metal bar reflection grid of the surface acoustic resonator device not only improves the omnidirectional reflection coefficient of the surface acoustic wave, but also obtains a more efficient surface acoustic wave resonance device, and also reduces the size of the reflection grid, which is very beneficial to obtain a highly integrated surface acoustic wave resonator device. In view of this point, the present invention proposes a surface acoustic wave gas sensor based on a two-dimensional phononic crystal reflection grid , that is, the two-dimensional phononic crystal composed of gas-sensitive semiconductor metal oxide and air column is used as the reflection grid at both ends of the resonator.
[0018] As shown in the figure, a sur...
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