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Mask plate shielding blade scratch monitoring system

A technology of monitoring system and mask board, which is applied in the field of mask board shielding blade scratch monitoring system to achieve the effect of avoiding machine downtime

Active Publication Date: 2022-04-08
CHANGXIN MEMORY TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Based on this, it is necessary to provide a scratch monitoring system for mask plate shielding blades to solve the problem of scratching between the mask plate shielding blade and the rod integrator housing when it moves

Method used

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  • Mask plate shielding blade scratch monitoring system
  • Mask plate shielding blade scratch monitoring system
  • Mask plate shielding blade scratch monitoring system

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Embodiment Construction

[0035] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.

[0036] In the description of the present application, it should be understood that the terms "central", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", " The orientation or positional relationship indicated by "bottom", "inner" and "outer" are based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the application and simplifying the description, rather than indicating or implying the referred device or positional relationship. Elements must have certain orientations, be cons...

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Abstract

The invention relates to a scraping monitoring system for shielding blades by a mask plate. A mask plate shielding blade scratch monitoring system is used to monitor the scratch between the mask plate shielding blade and the rod integrator housing. The mask plate shielding blade scratch monitoring system includes: a pressure detection module, which is arranged on the The end face of the rod integrator housing opposite to the mask plate shielding blade is used to detect the pressure between the mask plate shielding blade and the end face; the analog-to-digital conversion module is connected to the pressure detection module and Its output signal is converted into a digital signal; and a monitoring module is used to receive the digital signal of the analog-to-digital conversion module and output the detection result of the pressure detection module according to the digital signal. The above-mentioned mask plate shielding blade scratch monitoring system enables the user to monitor the scratch between the mask plate shielding blade and the end surface through the monitoring system, so as to avoid scratching the mask plate shielding blade.

Description

technical field [0001] The invention relates to the technical field of semiconductor photolithography, in particular to a monitoring system for scratching of blades shielded by a mask plate. Background technique [0002] In the field of semiconductor lithography technology, when photolithography is used to transfer circuit patterns to semiconductor substrates, a reticle masking (REMA, reticle masking) device is often arranged between the light source and the mask, and the reticle masking device is usually configured There are multiple REMA Blades, and by controlling the movement of the REMA Blades in two directions perpendicular to each other to control the position and size of the gap between them, thereby controlling the exposure on the mask Area. Among them, the light source needs to be processed by an integrator rod and then projected to the plate masking device, and the rod integrator is usually provided with a rod integrator housing (integrator rod housing) to keep th...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20G01L1/18
CPCG03F7/70483G01L1/18
Inventor 刘子成
Owner CHANGXIN MEMORY TECH INC
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