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Monitoring system for scratching of mask plate shielding blade

A monitoring system and mask technology, applied in optics, instruments, optomechanical equipment, etc., to achieve the effect of avoiding machine downtime

Active Publication Date: 2021-03-19
CHANGXIN MEMORY TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Based on this, it is necessary to provide a scratch monitoring system for mask plate shielding blades to solve the problem of scratching between the mask plate shielding blade and the rod integrator housing when it moves

Method used

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  • Monitoring system for scratching of mask plate shielding blade
  • Monitoring system for scratching of mask plate shielding blade
  • Monitoring system for scratching of mask plate shielding blade

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Embodiment Construction

[0035] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.

[0036] In the description of the present application, it should be understood that the terms "central", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", " The orientation or positional relationship indicated by "bottom", "inner" and "outer" are based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the application and simplifying the description, rather than indicating or implying the referred device or positional relationship. Elements must have certain orientations, be cons...

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Abstract

The invention relates to a monitoring system for scratching of a mask plate shielding blade. The monitoring system is used for monitoring scratching between the mask plate shielding blade and a rod integrator shell. The monitoring system comprises: a pressure detection module, which is arranged on the end surface, opposite to the mask plate shielding blade, of the rod integrator shell, and is usedfor detecting pressure between the mask plate shielding blade and the end surface; an analog-to-digital conversion module, which is connected with the pressure detection module and converts an outputsignal of the pressure detection module into a digital signal; and a monitoring module, which is used for receiving the digital signal of the analog-to-digital conversion module and outputting a detection result of the pressure detection module according to the digital signal. According to the monitoring system for the scratching of the mask plate shielding blade, a user can monitor scratching between the mask plate shielding blade and the end face through the monitoring system, so the mask plate shielding blade is prevented from being scratched.

Description

technical field [0001] The invention relates to the technical field of semiconductor photolithography, in particular to a monitoring system for scratching of blades shielded by a mask plate. Background technique [0002] In the field of semiconductor lithography technology, when photolithography is used to transfer circuit patterns to semiconductor substrates, a reticle masking (REMA, reticle masking) device is often arranged between the light source and the mask, and the reticle masking device is usually configured There are multiple REMA Blades, and by controlling the movement of the REMA Blades in two directions perpendicular to each other to control the position and size of the gap between them, thereby controlling the exposure on the mask Area. Among them, the light source needs to be processed by an integrator rod and then projected to the plate masking device, and the rod integrator is usually provided with a rod integrator housing (integrator rod housing) to keep th...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20G01L1/18
CPCG03F7/70483G01L1/18
Inventor 刘子成
Owner CHANGXIN MEMORY TECH INC
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