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5G ceramic filter film material and preparation method thereof

A technology of ceramic filter and membrane layer, which is applied in metal material coating process, coating, ion implantation plating, etc., which can solve the problems of high relative processing cost of sintering, low bonding strength of metal and ceramic, and environmental pollution of electroless plating/electroplating and other problems, to achieve the effect of good deposition film quality, low bonding strength and compact structure

Inactive Publication Date: 2020-09-01
BEIJING NORMAL UNIVERSITY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

And the existing method has following shortcoming: 1) metal and pottery bonding strength are low; 2) sintering is relatively high in processing cost; 3) electroless plating / electroplating environmental pollution

Method used

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  • 5G ceramic filter film material and preparation method thereof
  • 5G ceramic filter film material and preparation method thereof
  • 5G ceramic filter film material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] A preparation method for a 5G ceramic filter membrane material, specifically comprising the steps of:

[0043] S01: Carry out wet sandblasting, degreasing and degreasing treatment on the surface of the ceramic substrate; the particle size of the sand during wet blasting on the surface of the substrate is 300 mesh, and the wet spraying treatment time is 5s / piece; then the treated substrate is immersed in acetone, Ultrasonic cleaning with alcohol to remove oil and fat, and set aside;

[0044] S02: Using alloy metal NiCr as the cathode, use multi-arc targets to sputter and clean the cleaned ceramic substrate at the same time, where each target has an arc starting current of 100A, and the cleaning time is 30 minutes, and each group has three targets, a total of one group of alloy metal target to obtain an alloy layer with a deposition thickness of 0.1 μm;

[0045] S03: Using Cu as the cathode, a cylindrical multi-arc target is used to deposit a connecting layer with a thic...

Embodiment 2

[0048] A preparation method for a 5G ceramic filter membrane material, specifically comprising the steps of:

[0049] S01: Carry out wet sandblasting, degreasing and degreasing treatment on the surface of the ceramic substrate; the particle size of the sand during wet blasting on the surface of the substrate is 300 mesh, and the wet spraying treatment time is 5s / piece; then the treated substrate is immersed in acetone, Ultrasonic cleaning with alcohol to remove oil and fat, and set aside;

[0050] S02: Using alloy metal NiCu as the cathode, use multi-arc targets to sputter and clean the cleaned ceramic substrate at the same time, wherein each target has an arc starting current of 100A, and the cleaning time is 30 minutes, and each group has three targets, a total of one group of alloy metal target to obtain an alloy layer with a deposition thickness of 0.1 μm;

[0051] S03: Using Cu as the cathode, a cylindrical multi-arc target is used to deposit a connecting layer with a th...

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Abstract

The invention discloses a 5G ceramic filter film material and a preparation method thereof, and belongs to the technical field of ceramic material preparation. The film layer material is of a four-layer composite structure, a matrix is ceramic, a middle transition layer sequentially comprises an alloy layer and a connecting layer, a surface layer is a silver layer, wherein the alloy layer is obtained by taking alloy metal as a cathode and carrying out magnetron sputtering deposition on the ceramic matrix by utilizing a multi-arc target, the connecting layer is obtained by taking Mo, Cu or Cr as a cathode and depositing on the alloy layer by utilizing the cylindrical multi-arc target, and the surface silver layer is obtained by taking silver as a cathode and carrying out silver metal deposition on the connecting layer by utilizing the multi-arc target and a cylindrical target. According to the 5G ceramic filter film material and the preparation method thereof, magnetron sputtering and multi-arc ion plating are combined to prepare the film layer material, so that the problems of low bonding strength of metal and ceramic, high treatment cost and pollution to chemical plating / electroplating environment are solved, the preparation technology is simple and convenient, and the prepared 5G ceramic filter film layer material has the advantages of compact structure, no obvious defects and low insertion loss.

Description

technical field [0001] The invention belongs to the technical field of ceramic material preparation, discloses a 5G ceramic filter film layer material, and relates to a preparation method of the film layer material, that is, a method for metal deposition on the surface of a 5G ceramic filter. Background technique [0002] The 5G ceramic filter is made of metal oxide materials such as calcium magnesium titanium. This ceramic material is made into a sheet and coated with silver on both sides as electrodes. After DC high-voltage polarization, it has a piezoelectric effect. Because the filter has the characteristics of stability and good anti-interference performance, it is widely used as frequency selection components in various electronic products such as 5G base stations, TVs, video recorders, and radios. And because of its advantages of stable performance, no adjustment, and low price, it replaces the traditional LC filter network. [0003] At present, the main method of de...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/32C23C14/18C23C14/02H03H9/17H03H3/02
CPCC23C14/022C23C14/185C23C14/325C23C14/352H03H3/02H03H9/176
Inventor 廖斌欧阳潇欧阳晓平罗军陈琳庞盼张旭吴先映英敏菊
Owner BEIJING NORMAL UNIVERSITY
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