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Spray forming AlSnCu alloy target material and preparation method thereof

A spray forming and alloy target technology, which is applied in metal material coating process, sputtering coating, vacuum evaporation coating, etc., can solve the problem of difficult to meet the requirements of target structure and composition uniformity, composition segregation, etc. for measurement and control sputtering problems, to achieve the effect of fewer defects and impurities, and uniform composition

Active Publication Date: 2020-08-14
GRIMAT ENG INST CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The melting point of Sn is only 232°C, which is much lower than Al's melting point of 660°C, which leads to severe composition segregation when the material is prepared by traditional melting and casting processes, and the Sn phase is distributed in a network along the grain boundaries of Al matrix grains, which is difficult to obtain. Satisfy the requirements of uniformity of structure and composition of sputtering targets used in measurement and control

Method used

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  • Spray forming AlSnCu alloy target material and preparation method thereof
  • Spray forming AlSnCu alloy target material and preparation method thereof
  • Spray forming AlSnCu alloy target material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0033] The AlSnCu alloy target is prepared, and the ingredients are formulated according to the mass percentage, and the proportions of various materials included are as follows: the content of tin is 15wt.%, the content of copper is 1.0wt.%, the sum of impurities is less than 0.25wt.%, and the rest is aluminum.

[0034] (1) Melting materials: high-purity aluminum, copper (or aluminum-copper intermediate alloy) and tin are equipped with alloy raw materials according to the composition ratio. After mixing the above materials, melt in a protective atmosphere in a crucible. After all the ingredients are melted, carry out All-round mechanical stirring, stirring continues until the injection molding is completed.

[0035] (2) Dispersion: The alloy melt is controlled at 710°C, so that it can flow stably into the cavity of the injection molding equipment through a ceramic guide tube with a diameter of 4mm by its own weight. In the cavity of the injection molding equipment, the nitrog...

Embodiment 2

[0042] The AlSnCu alloy target is prepared, and the ingredients are formulated according to the mass percentage, and the proportions of various materials included are as follows: the content of tin is 25wt.%, the content of copper is 1.4wt.%, the sum of impurities is less than 0.24wt.%, and the rest is aluminum.

[0043](1) Melting materials: high-purity aluminum, copper (or aluminum-copper intermediate alloy) and tin are equipped with alloy raw materials according to the composition ratio. After mixing the above materials, melt in a protective atmosphere in a crucible. After all the ingredients are melted, carry out All-round mechanical stirring, stirring continues until the injection molding is completed.

[0044] (2) Dispersion: The alloy melt is controlled at 720°C, so that it can flow stably into the cavity of the injection molding equipment through a ceramic guide tube with a diameter of 4mm by its own weight. In the cavity of the injection molding equipment, the nitroge...

Embodiment 3

[0051] The AlSnCu alloy target is prepared, and the ingredients are formulated according to the mass percentage, and the proportions of various materials included are as follows: the content of tin is 20wt.%, the content of copper is 0.8wt.%, the sum of impurities is less than 0.25wt.%, and the rest is aluminum.

[0052] (1) Melting materials: high-purity aluminum, copper (or aluminum-copper intermediate alloy) and tin are equipped with alloy raw materials according to the composition ratio. After mixing the above materials, melt in a protective atmosphere in a crucible. After all the ingredients are melted, carry out All-round mechanical stirring, stirring continues until the injection molding is completed.

[0053] (2) Dispersion: The alloy melt is controlled at 700°C, so that it can flow stably into the cavity of the injection molding equipment through a ceramic guide tube with a diameter of 4mm by its own weight. In the cavity of the injection molding equipment, the nitrog...

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Abstract

The invention relates to a spray forming AlSnCu alloy target material and a preparation method thereof, and belongs to the field of preparation and machining of metal materials. In the target material, the tin content is 15 wt.% - 25 wt.%, the copper content is 0.8 wt.% - 1.4 wt.%, the sum of impurities is less than 0.3 wt.%, and the balance is aluminum. The preparation method comprises the following steps that batching is carried out according to the proportion, and an alloy material is heated and melted into alloy melt; the alloy melt flows into a cavity of spray forming equipment through aceramic flow guide pipe, and high-speed nitrogen serves as a carrier to disperse liquid flow into small liquid drops; the small liquid drops moving at a high speed are cooled to form semi-solid and semi-liquid small particles, and the semi-solid and semi-liquid small particles are gathered on a rotating receiving disc again to form an ingot blank; the ingot blank is turned and sheathed; the sheathed ingot blank is subjected to closed die forging treatment; and the die-forged blank is machined to obtain a final product. The AlSnCu alloy target material prepared through adopting the method is fine in crystalline grain, the crystalline grains are about 20 microns or below, an aluminum matrix and a tin phase are both in a uniform nearly isometric shape, the components of each part of the ingotblank are uniform, no obvious texture exists, and few or no defects or impurities exist.

Description

technical field [0001] The invention relates to an AlSnCu alloy target material for a high-power magnetron sputtering wear-reducing alloy layer and a preparation method thereof, in particular to a spray-formed AlSnCu alloy target material and a preparation method thereof, belonging to the field of preparation and processing of metal materials. Background technique [0002] High-power diesel engine bearings generally adopt the structure of steel back and copper-lead alloy matrix. In order to further improve the service life, bearing capacity, fatigue strength, etc. 20um AlSnCu alloy antifriction layer. The method of magnetron sputtering can ensure that the AlSnCu alloy friction-reducing layer has good uniformity and good bonding with the substrate. [0003] According to the data, the Austrian Miba company uses magnetron sputtering technology to sputter a layer of AlSn alloy with a very fine structure on the surface of the bearing with a steel back and copper-lead alloy matri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/34C23C14/16C22C21/00
CPCC23C14/35C23C14/3407C23C14/3414C23C14/165C22C21/003
Inventor 黄树晖朱宝宏刘红伟张永安
Owner GRIMAT ENG INST CO LTD
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