Film sensor for measurement of heat flow in high temperature environment and manufacturing method thereof

Abstract

The present invention provides a film sensor for measurement of a heat flow in a high temperature environment and a manufacturing method thereof, belonging to the technical field of film sensors. Theobjective of the invention is to provide a film sensor capable of improving the sensitivity of the heat flow sensor, performing stable work in a high temperature environment and achieving stable reading of thermoelectric force signals with a simple process. The technical scheme employed to solve the technical problem is that: the sensor comprises a micron ceramic substrate, a thermopile, an uppertemperature gradient isolation layer, a lower temperature gradient isolation layer, a positive extraction electrode and a negative extraction electrode, the positive extraction electrode and the negative extraction electrode are printed on an extraction electrode substrate, the thermopile is printed on a thermopile substrate, the thermopile comprises multiple pairs of positive and negative thermocouples which are connected end to end and circularly connected in series in a surrounding mode. The present invention further provides a manufacturing method of the sensor. The film sensor for measurement of the heat flow in the high temperature environment and the manufacturing method thereof are widely applied to the field of temperature gradient measurement.

Description

technical field [0001] The invention discloses a thin film sensor for measuring heat flow in a high temperature environment and a manufacturing method thereof, belonging to the technical field of thin film sensors. Background technique [0002] The heat flow sensor uses the proportional relationship between the heat flow and the temperature gradient in Fourier's theorem to measure the heat flow, and the temperature gradient is obtained by measuring the thermoelectric potential output by the thermocouple. The currently used heat flow sensors include round foil and thin film heat flow sensors. Compared with thin film sensors, the round foil heat flow sensor has a longer response time, and the use of water cooling at high temperatures makes the volume larger; The signal is generally weak, making it difficult to distinguish and read the signal; in addition, the film sensor also has the disadvantage of low sensitivity. For example, the patent CN203643055U, a kind of thin-film he...

AI Technical Summary

Problems solved by technology

The currently used heat flow sensors include round foil and thin film heat flow sensors. Compared with thin film sensors, the round foil heat flow sensor has a longer response time, and the use of water cooling at high temperatures makes the volume larger; The signal is generally weak, making it difficult to distinguish and read the signal; in addition, the film sensor also has the disadvantage of low sensitivity

For example, the patent CN203643055U, a kind of thin-film heat flow sensor for high temperature and large heat flow measurement, proposes that the heat flow sensor integrates a small number of thermopiles, and the temperature gradient generated by the thermal barrier layer material used to generate the temperature gradient is very small, so that the thermoelectric potential The output signal strength is limited, which makes the output sensitivity very small, which puts forward high requirements for data acquisition instruments; in addition, the sensor and its lead wires are complicated in manufacturing process, and the lead wires are easy to soften at high temperature and cause poor contact

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