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High temperature resistant multilayer piezoelectric ceramic actuator and preparation method and use thereof

A technology of piezoelectric ceramics and actuators, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., capable of Solve the problems of high price and high use temperature, and achieve the effect of low price, good high temperature resistance and lower sintering temperature

Inactive Publication Date: 2018-08-31
SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the most widely used electrode material is silver or silver-palladium metal electrode. Silver-palladium metal electrode has a high temperature but is expensive. The sintering temperature of the base piezoelectric ceramic is greater than 1000°C (I. Sterianou, et al, Appl. Phys. Lett.87, 299 (2005)), it is difficult to combine bismuth scandate-lead titanate based piezoelectric ceramics with relatively low-cost silver electrodes Combined with piezo actuators

Method used

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  • High temperature resistant multilayer piezoelectric ceramic actuator and preparation method and use thereof
  • High temperature resistant multilayer piezoelectric ceramic actuator and preparation method and use thereof
  • High temperature resistant multilayer piezoelectric ceramic actuator and preparation method and use thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0054] The specific preparation process of the high temperature resistant multilayer piezoelectric ceramic actuator of this embodiment is as follows:

[0055] (1) will Bi 2 o 3 , Sc 2 o 3 , PbO and TiO 2 By component 0.3BiScO 3 -0.7PbTiO 3 Weighing the molar ratio, and wet ball milling, heating and calcining (pre-calcining) the obtained mixture powder at a temperature of 750°C to 800°C, and keeping it warm for 2 hours to obtain the calcined powder;

[0056] (2) Add 0.1wt% sintering aid CuO of the calcined powder mass to the calcined powder obtained in step (1), and wet ball mill, and tape-cast the obtained mixture to obtain a ceramic diaphragm;

[0057] (3) The ceramic diaphragm obtained in step (2) is screen-printed to obtain a ceramic diaphragm with an internal silver electrode, and the layered ceramic diaphragm with an internal silver electrode pattern is laminated and heated at 800°C to 950°C The temperature is kept at a temperature range of 2 hours for firing, and ...

Embodiment 2

[0065] The specific preparation process of the high-temperature-resistant multilayer piezoelectric ceramic actuator of this embodiment refers to Example 1, the difference is that in step (2), the sintering aid is Li 2 CO 3 .

[0066] In the multilayer piezoelectric ceramic actuator sample obtained in this embodiment, the ceramic layer 1 is made of high temperature piezoelectric ceramic material 0.3BiScO 3 -0.7PbTiO 3 and burning aid Li 2 CO 3 Composition, the mass of the sintering aid is 0.1wt% of the mass of the high-temperature piezoelectric ceramic material, the internal electrode is a silver electrode, and the structure of the multilayer piezoelectric ceramic actuator sample is the same as that of the sample in Example 1. The specific test parameters and performance test results of Sample 4, Sample 5 and Sample 6 obtained in this embodiment are listed in Table 1.

[0067] All the samples obtained in this embodiment are applicable to the working temperature range of 25° ...

Embodiment 3

[0069] The specific preparation process of the high-temperature-resistant multilayer piezoelectric ceramic actuator of this embodiment refers to Example 1, the difference is that in step (2), the sintering aid is B 2 o 3 .

[0070] In the multilayer piezoelectric ceramic actuator sample obtained in this embodiment, the ceramic layer 1 is made of high temperature piezoelectric ceramic material 0.3BiScO 3 -0.7PbTiO 3 and burning aid B 2 o 3 Composition, the mass of the sintering aid is 0.1wt% of the mass of the high-temperature piezoelectric ceramic material, the internal electrode is a silver electrode, and the structure of the multilayer piezoelectric ceramic actuator sample is the same as that of the sample in Example 1. The specific test parameters and performance test results of samples 7 and 8 obtained in this embodiment are listed in Table 1.

[0071] All the samples obtained in this embodiment are applicable to the working temperature range of 25° C. to 300° C., and...

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Abstract

The invention discloses a high temperature resistant multilayer piezoelectric ceramic actuator and a preparation method and a use thereof. A piezoelectric ceramic layer in the piezoelectric ceramic actuator comprises a piezoelectric ceramic material and a sintering agent, and the piezoelectric ceramic material is bismuth scandate-lead titanate binary piezoelectric ceramic material of the formula xBiScO3-(1-x)PbTiO3. The preparation method comprises the following steps: 1) mixing a bismuth source, a scandium source, a lead source and a titanium source, performing crushing to obtain a raw material mixture, and performing calcining to obtain a calcined powder; 2) mixing the sintering agent with the calcined powder, performing crushing, and molding the obtained mixture to obtain a piezoelectric ceramic diaphragm; and 3) preparing an internal electrode on the surface of the piezoelectric ceramic diaphragm, laminating and firing the obtained piezoelectric ceramic diaphragm with internal electrodes, preparing an external electrode and performing polarization to obtain the piezoelectric ceramic actuator. The piezoelectric ceramic actuator is suitable for the operating temperature range of25 DEG C to 300 DEG C and is low in cost.

Description

technical field [0001] The invention belongs to the technical field of piezoelectric ceramic actuators, and relates to a high-temperature-resistant multilayer piezoelectric ceramic actuator, a preparation method and application thereof. Background technique [0002] In recent years, with the rapid development of modern industries such as aerospace, petrochemical, metallurgy and energy, the fields of automatic control of satellites and missiles, ultrasonic detection of oil wells, and fuel monitoring of engines in the automotive industry have put forward new requirements for equipment use environments. It is an urgent and challenging task to find piezoelectric ceramic materials with excellent properties such as excellent piezoelectric constant, high ferroelectric Curie temperature and large strain, and successfully apply them to high temperature resistant actuators. [0003] At present, the most commercially valuable PZT-based piezoelectric ceramics have a Curie temperature (T...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/083H01L41/09H01L41/18H01L41/187H01L41/27H01L41/37H01L41/43H10N30/50H10N30/05H10N30/092H10N30/097H10N30/20H10N30/85H10N30/853
CPCH10N30/50H10N30/20H10N30/8536H10N30/8548H10N30/852H10N30/8561H10N30/05H10N30/092H10N30/097
Inventor 陈朗张伟飞袁国亮
Owner SOUTH UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
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