Processing device for wire diamond-like coating

Abstract

The invention discloses a processing device for a wire diamond-like coating. The processing device comprises a paying-off coil used for wire paying-off and a take-up coil used for take-up connection and further comprises a diamond-like coating discharge tube arranged between the paying-off coil and the take-up coil and used for processing the diamond-like coating on a wire. The diamond-like coating discharge tube comprises a discharge tube main body which comprises a magnetic solid boot ring, an insulating sleeve, electrodes and a water cooled jacket. A plurality of sets of magnets are mountedon the magnetic solid boot ring, and magnetic solid boot rotating teeth are fixed to the magnetic solid boot ring and externally connected with a transmission structure so that the magnetic solid boot ring can be rotated. Magnetron sputtering can be conducted on the surfaces of miniature pieces and wire pieces to achieve PECVD of the diamond-like coating under the high vacuum, and large-beam flows can further be generated on the miniature pieces and the wire pieces to achieve high-ionization spraying of the wire diamond-like coating through annular tube gas discharge under the low vacuum.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and specifically refers to a wire rod diamond-like coating processing device. Background technique [0002] Friction and wear of solid materials generally exist in various fields of production and life, and friction and wear exist in all relative moving parts. Statistics at home and abroad show that energy consumed by friction accounts for 1 / 3 of the world's primary energy, about 80% of mechanical parts eventually fail due to constant wear and tear, and more than 50% of mechanical equipment is vicious Accidents occur due to lubrication failure and excessive wear. The physical, chemical and mechanical properties of the material surface have an important impact on the tribological properties of the material. After the surface of the solid material is pretreated, it is then subjected to surface coating, surface modification or composite treatment of various surface engineering technologies ...

AI Technical Summary

Problems solved by technology

However, there are still many problems in the preparation process of diamond-like coatings

[0004] The existing DLC ​​deposition technologies are mainly physical vapor deposition (PVD) and chemical vapor deposition (CVD). PVD mainly includes ion beam deposition (IBD), magnetron sputtering, multi-arc ion plating, pulsed laser deposition, etc. CVD includes thermal Silk chemical vapor deposition and plasma chemically enhanced vapor deposition (PECVD) have some problems: ion beam deposition has a low deposition rate due to the low sputtering rate of graphite; On the one hand, low atomic energy leads to loose structure and low hardness; a large number of carbon particles will be produced during multi-arc ion plating deposition; pulsed laser deposition has high energy consumption, poor coating uniformity, and small effective deposition area; hot wire vapor deposition technology has high deposition temperature, The range of matrix materials is greatly limited; although PECVD effectively reduces the reaction temperature, the deposition efficiency is low during the deposition process, the ionization rate of carbon atoms is low, and the film quality structure is not dense enough

However, due to the small size of micro-sized parts and wires, in order to meet the requirements of wear resistance, the equipment and technology have high requirements, and the traditional thermal spraying and physical chemical deposition equipment are not suitable for the processing of micro-sized parts and wires. On the one hand, there is a lot of waste of materials, on the other hand, the spraying industry has high energy consumption, high pollution, and low-quality product effects of physical and chemical deposition equipment, which cannot better meet the requirements of micro-sized and wire rods

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