Indium gallium antimonide crystal growing furnace with traveling wave magnetic field

Abstract

The invention provides an indium gallium antimonide crystal growing furnace with a traveling wave magnetic field. The indium gallium antimonide crystal growing furnace comprises a magnetic field generation mechanism, a vertical lifting mechanism and a furnace body supporting mechanism. The magnetic field generation mechanism is composed of an iron core, a three-phase conduction insulated wire, andan insulated protective shell; the three-phase conduction insulated wire is connected to a power supply; the power supply generates electric current, and the electric current generates a travelling wave magnetic field in a horizontal coil. By applying a travelling wave magnetic field in the crystal growing furnace, when the direction of the lorentz force caused by the travelling wave magnetic field is downward, the melted material of indium gallium antimonide in a crucible is conveyed under the action of the lorentz force so that the convection process of the melted material can be accelerated and cold and hot area distribution in a furnace hearth can be more uniform. Meanwhile, a rectangular wave current generator is used for periodically controlling phase displacement signals of the three-phase current in the coil, so that uniform distribution of the melted material is facilitated, macrosegregation is obviously weakened, and indium gallium antimonide crystal ingots with lower dislocation and better crystal quality are obtained.

Description

technical field [0001] The invention relates to the technical field of antimony indium gallium crystal growth equipment, in particular to an antimony indium gallium crystal growth furnace with a traveling magnetic field. Background technique [0002] During the crystal growth process, due to the conductivity of the melt, the internal flow can be suppressed or accelerated by applying a magnetic field, thereby reducing temperature fluctuations, reducing crystal growth streaks, and improving crystal quality. The main working principle is: the conductive melt flows in the ampoule due to the existence of a temperature gradient, and the speed perpendicular to the direction of the magnetic field can cut the applied magnetic field, and at the same time generate an induced current, which interacts with the magnetic field to generate Lorentz force, the direction of the Lorentz force is opposite to the direction of motion, which acts to restrain or accelerate the flow. [0003] The na...

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Problems solved by technology

In addition, the prerequisite for studying the traveling wave magnetic field is to design a magnetic field generator, and the design of the generator is a major difficulty

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