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MOS-pipe-based double-grid-regulation ultra-high-sensitivity biosensor

A biosensor, MOS tube technology, used in nanotechnology, instruments, scientific instruments and other directions for sensing, can solve the limitations of the wide application of ultra-high sensitivity biosensors, uncontrollable silicon nanobelt width, unstable device performance, etc. To avoid the loss of tumor markers, meet the needs of subsequent detection applications, and reduce processing and use costs

Active Publication Date: 2018-06-15
WUXI PEOPLES HOSPITAL
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, the traditional wet etching process for preparing silicon nanoribbons, due to the uncontrollable etching rate, leads to unstable device performance, and the width of the obtained silicon nanoribbons is also uncontrollable, which eventually greatly increases the cost, which largely limits Extensive applications of ultra-high sensitivity biosensors

Method used

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Embodiment 1

[0050] Embodiment 1: Preparation of sensor of the present invention

[0051] Such as figure 1 As shown, the MOS tube-based biosensor provided by the present invention, the detection system and the microfluidic channel system bonded to each other, the detection system includes a substrate 8 and an ion implantation layer 7 tiled above the substrate 8, the Two groups of U-shaped electrode groups facing away from each other are set on the ion implantation layer 7; the two wings of the U-shaped electrode group are source-drain electrodes 1, 4, and a top layer gate 3 is connected to the bottom of the U-shaped electrode group, and the A surface grid 2 parallel to the top grid 3 and not connected to the U-shaped electrode group is arranged inside the U-shaped electrode group;

[0052] The source-drain electrodes 1, 4 and the top gate 3 are sequentially composed of a silicon layer 10, an oxide layer 9 and a metal layer 6 upward from the ion implantation layer 7;

[0053] The bottom o...

Embodiment 2

[0076] Example 2: Trace and real-time detection of alpha-fetoprotein (AFP) and carcinoembryonic antigen (CEA):

[0077] Test according to the following methods:

[0078] A. Modification of antibody protein: connect the microfluidic channel, use a syringe pump or a peristaltic pump to pass 1-1000 μg / ml antibody at room temperature and stay on the surface of the silicon nanowire 5, and the modification time is less than 0.1-10 hours; Washing with dyeing washing solution / PBST solution, drying the biosensor with nitrogen gas, the purpose of these operations is to modify the corresponding antibody of the target tumor marker on the silicon nanowire 5 of the biosensor;

[0079] B. Analysis: After fixing, pricking, and connecting pathways on the probe station, use a syringe pump or a peristaltic pump to pass the PBS solution through the microchannel system for 1-100 minutes at a flow rate of 0.001-100ml / min to obtain the basic current value. Then slowly transport the sample to be teste...

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Abstract

The invention discloses a MOS-pipe-based double-grid-regulation ultra-high-sensitivity biosensor, which is suitable for a series of early-stage tumour detection. The sensor is made from an SOI sheet,and a unique double-grid control structure is formed through ion implantation. The sensor is made via ultraviolet lithography combined with an NLD etching method and can detect a trace amount of a tumour marker immediately without labeling. Compared with a common sensor used for detecting current or conductance, the sensor can detect change of capacitance in a channel in an antigen-antibody combination process. A detection method related in the invention is stable and good in interference immunity, and can meet the requirements of detection range and sensitivity, has extremely outstanding performance particularly with respect to detection sensitivity, and can detect a sample with the lowest concentration in a range of 1 fg / ml-1 ng / ml.

Description

technical field [0001] The invention relates to the technical field of biological material detection, in particular to a high-success-rate preparation and application method of an ultra-high-sensitivity biosensor based on a MOS tube. Background technique [0002] Malignant tumors are currently one of the major diseases that threaten human health, but most of the tumors are in the advanced stage of clinical manifestations, so early, rapid and sensitive diagnosis of them is an important way to improve the quality of human life. At present, the monitoring methods of clinical tumor incidence mainly rely on imaging examination and tumor marker detection. Imaging examinations often do not allow long-term follow-up due to resolution and radiation risks. Although the detection of tumor markers is relatively simple to operate, the sensitivity and specificity of tumor marker detection have become important factors that limit its application. Therefore, finding a simple and accurate ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N33/574G01N33/543G01N27/22B82Y15/00B82Y40/00
CPCG01N27/227G01N33/54366G01N33/57484B82Y15/00B82Y40/00G01N33/5438G01N33/574G01N27/4146G01N27/4145G01N33/57473G01N33/57476H01L21/02057H01L21/02164H01L21/0217H01L21/022H01L21/02238H01L21/02274H01L21/02532H01L21/02603H01L21/0274H01L21/26513H01L21/266H01L21/28079H01L21/28194H01L21/28568H01L21/3065H01L21/308G01N33/54373
Inventor 王彤
Owner WUXI PEOPLES HOSPITAL
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