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Layer structure mass block and manufacturing method thereof, and acceleration sensor and manufacturing method thereof

A technology of acceleration sensor and manufacturing method, which is applied in the directions of speed/acceleration/shock measurement, acceleration measurement using inertial force, detailed information of speed/acceleration/electric shock meter, etc., can solve the problem of high temperature resistance density and poor thermal compatibility of acceleration sensor , The thermal adaptation of the overall structure is not considered, and the thermal expansion coefficient of the material is not considered, so as to achieve the effect of good thermal adaptation and good overall thermal adaptation.

Pending Publication Date: 2018-05-04
CHENGDU TECHCAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the currently widely used mass block is a single alloy material with high temperature resistance and high density, which does not consider the thermal adaptation of the overall structure and the accurate thermal expansion coefficient of the material.
Such an acceleration sensor has poor thermal adaptability

Method used

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  • Layer structure mass block and manufacturing method thereof, and acceleration sensor and manufacturing method thereof
  • Layer structure mass block and manufacturing method thereof, and acceleration sensor and manufacturing method thereof
  • Layer structure mass block and manufacturing method thereof, and acceleration sensor and manufacturing method thereof

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preparation example Construction

[0076] Using the above-mentioned preparation method of the layered mass 10, the comprehensive thermal expansion coefficient of the layered mass 10 is equal to the first preset coefficient of expansion, and the thickness ratio of each layer is obtained, and then the specific thickness of each layer is determined to make the total thickness Is L.

[0077] In the embodiment of the present invention, the sensitive element may include multiple, and the expansion effect of multiple linearly arranged sensitive elements should be superimposed.

[0078] Then, the layered structural mass 10 is assembled with sensitive elements, studs, etc. to obtain an acceleration sensor.

Embodiment 1

[0081] figure 2 It is a schematic structural diagram of the middle-layer structural mass 100 in Embodiment 1 of the present invention from a first perspective; image 3 It is a schematic view of the structure of the mass 100 in the second embodiment of the present invention. Please refer to figure 2 with image 3 This embodiment provides a layered mass 100 and a manufacturing method thereof, an acceleration sensor and a manufacturing method thereof.

[0082] Figure 5 It is a schematic diagram of a partial structure of the acceleration sensor 300 in Embodiment 1 of the present invention. Please refer to Figure 5 In this embodiment, the acceleration sensor 300 includes a mass 100, a stud 310, and a sensitive element 320. The stud 310 penetrates the mass 100 and the sensitive element 320 from the thickness direction, and is fastened by a nut 330. In the case where the thickness of the nut 330 is small relative to the mass 100 and the sensitive element 320, the thermal expansi...

Embodiment 2

[0091] Figure 4 It is a schematic diagram of the structure of the mass block 200 in the second embodiment of the present invention. This embodiment provides a layered structure mass 200 and a manufacturing method thereof. The manufactured layered structure mass 200 needs to meet the first predetermined expansion coefficient and density requirements in Embodiment 1.

[0092] In this embodiment, three plies are selected to make the layer structure mass 200. Specifically, the layered mass 200 includes a rectangular first layer 210, a second layer 220, and a third layer 230. The first layer 210 is gold with a density of 19.3 g / cm 3 , The thermal expansion coefficient is 14.2E-6 / K; the second layer 220 is iron, and the density is 7.8g / cm 3 , The thermal expansion coefficient is 12.2E-6 / K; the third layer 230 is manganese, and the density is 7.4g / cm 3 , The thermal expansion coefficient is 23E-6 / K. The three layers are connected by bonding.

[0093] First preset the thickness ratio of ...

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Abstract

The invention relates to the field of sensing devices, and discloses a layer structure mass block and a manufacturing method thereof, and an acceleration sensor and a manufacturing method thereof. Thelayer structure mass block includes at least two sheet layers, and the two sheet layers are stacked in the thickness direction and made of materials having different thermal expansion coefficients. The overall thermal expansion coefficient of the layer structure mass block can be determined by the thickness and thermal expansion coefficient of each sheet layer so that technicians can manufacturethe layer structure mass block through two or more existing materials to reach the required thermal expansion coefficient without having to rely on finding a single material or preparing an alloy material to bring the material closer to the expected thermal expansion coefficient. The method for manufacturing the acceleration sensor includes the steps of manufacturing the layer structure mass blockhaving the overall thermal expansion coefficient equal to the expected thermal expansion coefficient through the manufacturing method, and performing assembly with other components to obtain the acceleration sensor.

Description

Technical field [0001] The invention relates to the field of sensing equipment, in particular to a layered mass block and a manufacturing method thereof, an acceleration sensor and a manufacturing method thereof. Background technique [0002] The acceleration sensor works in a wide temperature range. Due to the effect of temperature, the range of acceleration shocks that the sensor bears will change with temperature changes. If the sensor structure becomes loose as the temperature rises, the range of the sensor when working at high temperatures will become smaller. When the sensor is over-range due to a large impact, the sensor may fail such as falling off. Therefore, in order to ensure the stability of sensor performance with temperature changes, the thermal stability of the overall structure of the sensor is very important. [0003] The mass block is one of the core components of the acceleration sensor, and it is required to have a large mass to generate a large inertial force....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/02G01P1/00
CPCG01P1/00G01P15/02Y02P10/25
Inventor 田亚铃李吉淡俊杰李柏林李刚俊郭成操
Owner CHENGDU TECHCAL UNIV
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