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CrAlSiN nano composite coating with gradient-change Al content and preparation method thereof

A nano-composite coating, gradient change technology, applied in coating, metal material coating process, ion implantation plating and other directions, can solve the large stress of coating, CrN phase lattice distortion, reduce the gap between coating and substrate Bonding force and other issues, to achieve the effect of low internal stress, dense structure and small grain size

Active Publication Date: 2018-03-30
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the solid solution of Al in the CrN phase will cause lattice distortion of the CrN phase, which will generate greater stress in the coating and reduce the bonding force between the coating and the substrate.

Method used

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  • CrAlSiN nano composite coating with gradient-change Al content and preparation method thereof
  • CrAlSiN nano composite coating with gradient-change Al content and preparation method thereof
  • CrAlSiN nano composite coating with gradient-change Al content and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] This example is a CrAlSiN nano-composite coating with a gradient change in Al content prepared on a polished cemented carbide sheet YG8 by using high-power pulse and DC pulse co-sputtering technology. The size of the high-speed steel sample is 19×19× 2mm 3 . The substrate was ultrasonically cleaned in acetone, alcohol and distilled water successively for 20 min, and then cleaned with high-purity N 2 Blow dry, and then place it on the sample rack facing the target in a high-power pulse and DC pulse co-sputtering coater. The revolution speed of the turntable is selected as 30r / min, and the distance between the target and the substrate is 70mm. The targets are made of pure metals Cr, Al and Si (all with a purity of 99.99wt.%), and the working gas and reaction gas are made of high-purity Ar and N respectively. 2 (both volumetric purity is 99.999%).

[0030] Use mechanical pump and molecular pump to evacuate, and firstly evacuate the background vacuum of the vacuum chambe...

Embodiment 2

[0037] In this example, a CrAlSiN nanocomposite coating with a gradient change in Al content is deposited on a polished cemented carbide substrate YG8, and the sample size is 19×19×2mm 3 . The substrate was ultrasonically cleaned in acetone, alcohol and distilled water successively for 20 min, and then cleaned with high-purity N 2 Blow dry, put the sample on the turntable, the rotating speed of the turntable is selected as 30r / min, and the target base distance is 70mm. The targets are made of pure metal Cr and Al (99.99wt.% pure), and the working gas and reaction gas are made of Ar and N respectively. 2 (both volumetric purity is 99.999%). In the process of depositing the CrAlSiN nanocomposite coating in this embodiment, the powers of the Cr target and the Si target are respectively 0.8 kW and 0.6 kW. The Al target power is linearly increased from 0.4kW to 0.8kW, and other process parameters are the same as in Example 1.

[0038] The CrAlSiN nanocomposite coating prepared ...

Embodiment 3

[0040] This example is to deposit a CrAlSiN nanocomposite coating with a gradient change in Al content on a polished 304 stainless steel substrate, and the sample size is 30×30×1mm 3 . The substrate was ultrasonically cleaned in acetone, alcohol and distilled water successively for 20 min, and then cleaned with high-purity N 2 Blow dry, put the sample on the turret, the rotating speed of the turret is selected as 20r / min, and the target base distance is still 70mm. The targets are made of pure metal Cr and Al (99.99wt.% pure), and the working gas and reaction gas are made of Ar and N respectively. 2 (volume purity is 99.999%), nitrogen and argon flow ratio N 2 / Ar is 1. In the process of depositing the CrAlSiN nanocomposite coating in this embodiment, the powers of the Cr target and the Si target are respectively 0.8 kW and 0.6 kW. The Al target power is linearly increased from 0.4kW to 1kW, and other process parameters are the same as in Example 1.

[0041] The CrAlSiN n...

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Abstract

The invention relates to the field of coating preparation, in particular to a CrAlSiN nano composite coating with a gradient-change Al content and a preparation method thereof. The CrAlSiN nano gradient coating is prepared on a metal or hard alloy substrate through high-power pulse and direct current pulse co-sputtering technology. Pure metals Cr, Al and Si are selected as target materials, the Crtarget is selected for high-power pulse, and the Al and Si targets are selected for direct current pulse sputtering. Al gas is introduced in first before coating, -800 V bias voltage is adopted, andglow cleaning is conducted on the substrate for 10-30 min. The three target materials are started afterwards, and bombardment cleaning is conducted on the surfaces of the substrate and target materials. The Al and Si targets are closed, and a pure Cr transition layer is deposited for 10-40 min. The Al target and the Si target are started, the CrAlSiN nano composite coating is deposited for 120-480min. In the depositing process, power of the Cr target and the Si target is kept unchanged, and the power of the Al target is increased linearly to 0.8-2 kW from 0.4 kW. The CrAlSiN nano gradient coating is good in comprehensive performance and has high hardness and small residual internal stress.

Description

technical field [0001] The invention relates to the field of coating preparation, in particular to a CrAlSiN nanocomposite coating with a gradient change in Al content and a preparation method thereof. Background technique [0002] With the increasing application of high-speed cutting and dry cutting, the cutting temperature that the tool must withstand is gradually increasing, so it is necessary to develop a tool coating with higher heat resistance. CrAlSiN coating has ultra-high hardness (up to 40GPa or more), and has good toughness, wear resistance and high temperature resistance, and has been favored by more and more researchers. A large number of research results show that the mechanical properties, friction and wear resistance and high temperature resistance of CrAlSiN nanocomposite coatings are superior to those of CrN, CrAlN and TiAlSiN coatings, so it will have better performance in high-speed cutting, dry machining and other working conditions. Application prospec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/34
Inventor 范其香王铁钢吴正环刘艳梅
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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