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Preparing method of barium zirconate titanate thin film pressure control varactor

A technology of barium zirconate titanate and varactor, which is applied in voltage variable capacitors, ion implantation plating, coating, etc., can solve the problems of high dielectric loss, unfavorable system miniaturization, low power consumption and low cost, etc. , to achieve the effect of high tuning rate, good application prospect and excellent electrical performance

Inactive Publication Date: 2018-02-27
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, phase shifters are generally implemented with ferrite voltage-controlled materials. This material has a high dielectric loss and requires the circuit to provide a high control voltage, which is not conducive to the development requirements of system miniaturization, low power consumption and low cost.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] 1. The BZT target is prepared by the solid-state sintering method, and the BaZr is pressed with an electronic balance. 0.2 Ti 0.8 o 3 Weigh BaCO corresponding to the stoichiometric ratio 3 , ZrO 2 and TiO 2 , The raw material quality purity is 99%. After being fully mixed, it is pressed into a green body, and the green body is placed in a box-type electric furnace and gradually heated to 1200 ° C, and kept for 6 hours to obtain BaZr 0.2 Ti 0.8 o 3 (BZT) target.

[0023] 2. The Pt-Si substrate was ultrasonically cleaned with acetone, ethanol and deionized water, and then cleaned with N 2 Blow dry and put on the pulsed laser deposition product table, the distance between target and base is 6cm.

[0024] 3. Pump the background vacuum of the pulsed laser deposition system to 3.0×10 -4 Pa, and then heat the substrate, the substrate temperature is 700 °C.

[0025] 4. Pass high-purity (99.99%) O 2 , the oxygen pressure is 0.8Pa, and the BaZr with a thickness of 250...

Embodiment 2

[0030] 1. The BZT target is prepared by the solid-state sintering method, and the BaZr is pressed with an electronic balance. 0.2 Ti 0.8 o 3 Weigh BaCO corresponding to the stoichiometric ratio 3 , ZrO 2 and TiO 2 , The raw material quality purity is 99%. After being fully mixed, pressed and formed, and finally placed in a box-type electric furnace, the temperature was gradually raised to 1200 ° C and kept for 6 hours to obtain BaZr 0.2 Ti 0.8 o 3 target.

[0031] 2. The Pt-Si substrate was ultrasonically cleaned with acetone, ethanol and deionized water, and then cleaned with N 2 Blow dry and put on the pulsed laser deposition product table, the distance between target and base is 6cm.

[0032] 3. Pump the background vacuum of the pulsed laser deposition system to 3.0×10 -4 Pa, and then heat the substrate, the substrate temperature is 700 °C.

[0033] 4. Pass high-purity (99.99%) O 2 , the oxygen pressure is 15Pa, and the BaZr with a thickness of 250nm is deposite...

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Abstract

The invention discloses a preparing method of a barium zirconate titanate thin film pressure control varactor. The preparing method comprises the steps of firstly weighing raw materials of BaCO3, ZrO2and TiO2 according to the stoichiometric ratio of BaZr0.2ToO0.8O3 and baking BaZr0.2Tii0.8O3, namely a BZT target material, at 1,200 DEG C; putting a Pt-Si substrate onto a pulse laser depositing product table, vacuumizing a background of a pulse laser depositing system to P<4.0x10<-4> Pa and then heating the substrate to 350-750 DEG C; opening a gas inlet valve, introducing oxygen into the system and depositing on the Pt-Si substrate to obtain BaZr0.2Ti0.8O3 thin film with the thickness being 150-300 nm; utilizing a chrome mask to prepare a metal electrode on the BaZr0.2Ti0.8O3 thin film toobtain the barium zirconate titanate thin film pressure control varactor. The tunability of the barium zirconate titanate thin film pressure control varactor is larger than or equal to 60%, the testing frequency is 100 kHz, the device stability is high, the preparing technology is simple, the electrical properties are high, and the application prospect is good.

Description

technical field [0001] The invention relates to electronic information materials and components, in particular to a barium zirconate titanate film voltage-controlled varactor and a preparation method thereof. Background technique [0002] In recent years, with the rapid development of electronic information technology, radars are facing threats such as stealth aircraft, high-speed anti-radiation missiles, integrated electronic interference and ultra-low altitude penetration. Therefore, the requirements for radar performance are getting higher and higher. Phased array radar is the product of a variety of high-tech technologies, with the characteristics of beam agility, which can meet the growing demand for high-performance radar systems. In phased array radar, the phase shifter is an important basic component of the feed system. Its basic function is to change the phase of the microwave signal. It is closely connected to the radiation source of the antenna and the T / R compon...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01G7/06C23C14/28C23C14/08
CPCH01G7/06C23C14/088C23C14/28
Inventor 李玲霞郑浩然于仕辉陈思亮孙正
Owner TIANJIN UNIV
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