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Method for preparing diamond film on stainless steel surface

A technology of diamond thin film and stainless steel, which is applied in metal material coating process, gaseous chemical plating, coating, etc., can solve the problems of film shedding, difficult formation of diamond film, and large difference in thermal expansion coefficient of diamond. The effect of improving conductivity, relieving stress, and increasing nucleation rate

Active Publication Date: 2017-11-28
ZHEJIANG UNIV OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, there are the following problems in depositing a continuous diamond film on the surface of stainless steel: (1) there are iron and nickel elements in stainless steel, which will catalyze the formation of graphite phase in chemical vapor deposition (CVD), making it difficult to form a diamond film; (2) the atmosphere The carbon element in the carbon will diffuse into the stainless steel in a large amount, resulting in the inability to reach the critical carbon concentration of diamond nucleation and the formation of a diamond film; (3) The thermal expansion coefficient of diamond is very different from that of stainless steel. During the cooling stage of the CVD process, A large thermal stress will be formed in the diamond film, which will cause the film to fall off
However, if the diamond film has been deposited at a low temperature, its deposition rate is low, and it will cause a low degree of carbonization reaction of the transition layer, resulting in insufficient bonding force between the diamond / transition layer, and problems such as film peeling.

Method used

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  • Method for preparing diamond film on stainless steel surface
  • Method for preparing diamond film on stainless steel surface
  • Method for preparing diamond film on stainless steel surface

Examples

Experimental program
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Effect test

Embodiment 1

[0032] Use a sandblasting machine (XL-S-9060 / 1A, Shanghai Xufeng Machinery Equipment Co., Ltd.) to sandblast the surface of the 3Cr13 martensitic stainless steel sample. The sandblasting parameters are as follows: time 10min, sand is 80 mesh glass sand, working pressure is 0.3MPa, the roughness of the sample after blasting is R a = 2 μm.

[0033] After sandblasting, use acetone and ethanol to ultrasonically clean for 20 minutes respectively, and blow dry. Then use an unbalanced magnetron sputtering apparatus udp650 to deposit Cr / CrN / CrTiAlN coating on it. The specific process parameters are: when sputtering the Cr layer, the Cr target power is 4.4kW, and the time is 5min; when sputtering the CrN layer, The power of Cr target is 4.4kW, the time is 20min, the flow ratio of nitrogen and argon is 0.93; when sputtering CrTiAlN, the power of Cr target is 4.4kW, the power of Ti target is 8kW, the power of Al target is 8kW, and the deposition time is 50min. The film was detected by ...

Embodiment 2

[0039]Use a sandblasting machine (XL-S-9060 / 1A, Shanghai Xufeng Machinery Equipment Co., Ltd.) to blast the surface of 304 austenitic stainless steel samples. The sandblasting parameters are as follows: time 2min, sand is 50 mesh glass sand, working pressure is 0.05MPa.

[0040] After sandblasting, use acetone and ethanol to ultrasonically clean for 20 minutes respectively, and blow dry. Then use unbalanced magnetron sputtering apparatus udp650 to deposit Cr / CrN / CrTiAlN coating on it. The process parameters are: when sputtering Cr layer, the Cr target power is 4.4kW, and the time is 8min; when sputtering CrN layer, Cr The target power is 4.4kW, the time is 30min, the flow ratio of nitrogen and argon is 0.93; when sputtering CrTiAlN, the Cr target power is 4.4kW, the Ti target power is 6kW, the Al target power is 6kW, and the deposition time is 100min. The film was detected by a ball pit instrument (BC-2, Teer Coating Company), and the total thickness of the film was 4 μm, the...

Embodiment 3

[0046] Use a sandblasting machine (XL-S-9060 / 1A, Shanghai Xufeng Machinery Equipment Co., Ltd.) to sandblast the surface of 0Cr13 ferritic stainless steel samples. The sandblasting parameters are as follows: time 20min, sand is 220 mesh glass sand, working pressure is 0.6MPa.

[0047] After sandblasting, use acetone and ethanol to ultrasonically clean for 20 minutes respectively, and blow dry. Then use an unbalanced magnetron sputtering instrument udp650 to deposit CrTiAlN coating on it. The process parameters are: when sputtering Cr layer, the Cr target power is 4.4kW, and the time is 10min; when sputtering CrN layer, the Cr target power is 4.4 kW, the time is 40min, the flow ratio of nitrogen and argon is 0.93; when sputtering CrTiAlN, the Cr target power is 4.4kW, the Ti target power is 1kW, the Al target power is 1kW, and the deposition time is 160min. The film was detected by ball pit instrument (BC-2, Teer coating company), and its total thickness was 5 μm, the thicknes...

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Abstract

The invention provides a method for preparing a diamond film on the stainless steel surface by using Cr / CrN / CrTiAlN as a transition layer. The method comprises the following steps: blasting the stainless steel surface; depositing the Cr / CrN / CrTiAlN transition layer on the blasted stainless steel surface with magnetron sputtering, and depositing the diamond film on the prepared Cr / CrN / CrTiAlN transition layer with chemical vapor deposition. According to the method, Cr / CrN / CrTiAlN is adopted as the transition layer, diffusion of Fe and C is effectively blocked, the nucleation rate is increased, the diamond film can be prepared at a low temperature, and the stress value of the diamond film is smaller and smaller than or equal to 1.25 GPa. Compared with thermal conductivity of stainless steel, the thermal conductivity of the coated stainless steel is increased by 3%-11%.

Description

(1) Technical field [0001] The invention relates to a method for depositing a diamond film on a stainless steel surface, in particular to a method for preparing a diamond film on a stainless steel surface by using Cr / CrN / CrTiAlN as a transition layer. (2) Background technology [0002] Diamond has excellent physical and chemical properties, such as excellent biocompatibility, high thermal conductivity, high hardness, excellent wear resistance and corrosion resistance, etc. Stainless steel is an important class of metal materials, widely used in food industry, medical equipment and so on. Depositing a diamond film on the surface of stainless steel can effectively improve the thermal conductivity, corrosion resistance and surface hardness of stainless steel, which is of great significance for improving the service life of stainless steel appliances. However, there are the following problems in depositing a continuous diamond film on the surface of stainless steel: (1) there a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/27C23C16/02
CPCC23C16/0281C23C16/27
Inventor 李晓陈建清胡晓君冯涛
Owner ZHEJIANG UNIV OF TECH
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