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Preparing technology for high-aluminum-content ultra-dense Al-Cr-Si-N coating

A preparation process, al-cr-si technology, applied in the field of preparation of ultra-dense Al-Cr-Si-N nanocomposite coatings with high aluminum content, can solve the problems of low wear and low wear rate, and achieve a wide range of applications , dense structure, high hardness and toughness

Active Publication Date: 2017-07-28
TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the lack of Si(OH) during high temperature friction 4 , the friction coefficient is significantly improved, but the wear rate is low, showing high friction and low wear phenomenon

Method used

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  • Preparing technology for high-aluminum-content ultra-dense Al-Cr-Si-N coating
  • Preparing technology for high-aluminum-content ultra-dense Al-Cr-Si-N coating
  • Preparing technology for high-aluminum-content ultra-dense Al-Cr-Si-N coating

Examples

Experimental program
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Effect test

Embodiment 1

[0026] In this example, a high aluminum content Al-Cr-Si-N coating was deposited on a mirror-polished single crystal Si wafer ((100) orientation), and the sample size was 40×30×0.67 mm. The substrate was ultrasonically cleaned in degreasing agent and alcohol solution for 20 minutes respectively, then dried with high-purity nitrogen, and then placed on the sample holder in the vacuum chamber facing the target. The coating process is carried out on V-TECH HIPIMS 610 / 610 high-power pulse magnetron sputtering coating machine, and the cathode high-power target is Al-Cr-Si alloy target (atomic ratio Al:Cr:Si=6:3:1, The purity is 99.8 wt.%, the size is 300×100×5 mm), the working gas and reaction gas are Ar and N 2 (both purity 99.999%), figure 1 A schematic diagram of a high-power pulsed magnetron sputtering system. When nitrogen gas is fed to participate in the reaction, the nitrogen gas goes through the gas mixing tank on the right side, and only the argon gas enters the vacuum c...

Embodiment 2

[0030] In this embodiment, Al-Cr-Si is deposited on a mirror-polished AISI 304 stainless steel substrate (Cr-18.5, Ni-9.4, Mn-0.8, Si-0.4, P-0.1, Fe balance, all by weight percentage). -N coating, the sample size is 30 × 25 × 1 mm. The substrate was first ground and polished by metallographic sandpaper, then ultrasonically cleaned with acetone and alcohol solutions respectively, dried and placed on the sample holder facing the target in the vacuum chamber. The deposition parameters are the same as in Example 1.

[0031] The hardness of the Al-Cr-Si-N coating deposited on the stainless steel substrate was tested by nanoindentation technique, and the measured result was ~30 GPa. Figure 4 It is the X-ray diffraction pattern of the Al-Cr-Si-N coating. When the diffraction angle 2θ=44°, the (200) diffraction peaks of aluminum nitride and chromium nitride in the coating overlap, because the Al atoms are dissolved in NaCl In the CrN lattice of the structure, the lattice distortion...

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Abstract

The invention relates to a nano composite coating and a preparing technology thereof, in particular to a preparing technology for a high-aluminum-content ultra-dense Al-Cr-Si-N nano composite coating. An Al-Cr-Si-N nano composite coating is deposited on a metal or alloy base body through the high-power pulse magnetron sputtering technology. An Al-Cr-Si alloy target is selected as a target material, wherein the atomic ratio of Al to Cr to Si is 6:3:1, purity is 99.8 wt.%, and the size is 300 x 100 x 5 mm; before film coating, inflation of Ar is conducted firstly, striking is conducted at the bias voltage of -800 V, high-power pulse magnetron sputtering of the Al-Cr-Si target is conducted, and bombardment cleaning is conducted on the surface of the base body. Then, the bias voltage is reduced to -30 V, an Al-Cr-Si transition layer is deposited, then inflation of the reaction gas N2 is conducted finally, and deposition of the Al-Cr-Si-N coating is started. The related preparing technology for the high-aluminum-content ultra-dense Al-Cr-Si-N nano composite coating is simple, repeatability is good, and industrial production is easy. The prepared Al-Cr-Si-N coating is high in hardness, good in tenacity, low in internal stress and excellent in abrasion resisting performance; and the coating organization structure is extremely dense and is firmly combined with the base body, and the high-temperature oxidation resisting capability is high.

Description

technical field [0001] The invention relates to coating preparation technology, in particular to a preparation technology of ultra-dense Al-Cr-Si-N nanocomposite coating with high aluminum content. Background technique [0002] With the rapid development of modern industry, high efficiency, high precision, high flexibility and greening have become the important development direction of contemporary advanced manufacturing industry. mainstream. The emergence of high-speed cutting, hard cutting and dry cutting technology has put forward higher and higher requirements for metal cutting tools such as taps, twist drills, gear tools, broaches, small diameter milling cutters, etc. Traditional tools generally have poor wear resistance, Poor high temperature oxidation resistance, short life and other disadvantages are not suitable for the increasingly harsh modern cutting environment, and coating technology is an effective way to solve this problem. The service environment of tool c...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/16C23C28/00
CPCC23C14/0036C23C14/0641C23C14/165C23C14/3485C23C14/35C23C28/321C23C28/347
Inventor 王铁钢李柏松刘艳梅戚厚军阎兵范其香李彤
Owner TIANJIN UNIV OF TECH & EDUCATION TEACHER DEV CENT OF CHINA VOCATIONAL TRAINING & GUIDANCE
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