Multistage Magnetic Field Arc Ion Plating Method of Lining Positively Biased Conical Tube and Straight Tube Composite

Abstract

The invention relates to a multistage magnetic field electric arc iron plating method adopting lining positive bias tapered pipe and straight pipe compositing and belongs to the technical field of material surface treatment. The problem of losses in the process of pollution cleaning of macroparticles and deposited irons to the inner wall of a pipe and transmitting of electric arc plasma in a filtering device of a multistage magnetic field is solved. The method comprises the following steps that firstly, a workpiece to be subjected to film plating is placed on a sample table in a vacuum chamber, relative power supplies are powered on, and an external water-cooling system is started; secondly, a thin film is deposited, specifically, when the vacuum degree in the vacuum chamber is smaller than 10<-4> Pa, working air is pumped in, air pressure is adjusted, and a film plating power supply is started; meanwhile, a bias power supply is utilized to attract electric arc plasma in an outlet, and energy is adjusted; by means of the self obstructing shield of a lining positive bias tapered pipe and straight pipe compositing device, the inhibiting effect of a positive bias electric field and the filtering effect of the multistage magnetic field, the macroparticile defect is effectively eliminated, and the transmitting efficiency of the electric arc plasma is guaranteed; and the needed process parameters are set to prepare the thin film.

Description

technical field [0001] The invention relates to a multi-stage magnetic field arc ion plating method in which a positively biased conical tube and a straight tube are combined, and belongs to the technical field of material surface treatment. Background technique [0002] In the process of preparing thin films by arc ion plating, due to the arc spot current density as high as 2.5~5×10 10 A / m 2 , causing molten liquid metal to appear at the arc spot position on the target surface, which is splashed out in the form of droplets under the action of local plasma pressure, and adheres to the surface of the film or is embedded in the film to form "macroparticles" (Macroparticles) Defects (BoxmanR L, Goldsmith S. Macroparticle contamination in cathodic arc coatings: generation, transport and control [J]. Surf Coat Tech, 1992, 52(1): 39-50.). In the arc plasma, since the movement speed of electrons is much greater than that of ions, the number of electrons reaching the surface of la...

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Problems solved by technology

[0004] The purpose of the present invention is to solve the traditional arc ion plating method using low-melting point pure metal or multi-element alloy material and non-metallic material (such as graphite) as the target material, which is easy to produce large particle defects, and the arc plasma transmission efficiency caused by the curved magnetic filter technology. Low-level problems, combined with the multi-level magnetic field filtering method and the composite effect of the mechanical barrier shielding of the conical tube's own shape and the positive bias electric field attraction, at the same time ensure that the arc plasma passes through the conical tube and the multi-level magnetic field with high transmission efficiency The filtering device enables continuous and dense preparation of high-quality thin films on the surface of the workpiece under the condition of applying negative bias voltage, and at the same time realizes the control of element content in the thin film, reduces the production cost of using alloy targets, improves the deposition efficiency of thin films, and reduces large particle defects Detrimental effects on film growth and performance, a multi-stage magnetic field arc ion plating method lined with positively biased conical tubes and straight tubes is proposed

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