Silicon monoxide nano material and preparation method thereof
A nanomaterial, silicon monoxide technology, applied in the field of silicon oxide, can solve the environmental pollution of silicon crushed debris and other problems, and achieve the effects of reducing sintering and agglomeration, low production cost and high activity
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[0035] The preparation method of above-mentioned silicon monoxide nanometer material, comprises the steps:
[0036] (1) The diamond wire-cut silicon powder, millimeter-sized polysilicon powder and silicon oxide compound are uniformly mixed in proportion by wet or dry method, wherein the wet-mixed mixture must be dried to remove water.
[0037] (2) Put the above-mentioned dry mixture into a crucible, cover the mixture evenly with a layer of millimeter-sized polysilicon powder, and send it to a vacuum furnace.
[0038] (3) Turn on the vacuum pump, raise the temperature to 400-700°C, keep the negative pressure for a certain period of time, control the vacuum degree to 500pa-1000pa, remove the residual moisture and organic impurities in the material, and avoid the existence of impurities from affecting the purity of the product, so as to improve product quality.
[0039] (4) Turn on the argon gas preheating heater, open the argon gas tank, pass argon gas into the vacuum furnace, ...
Embodiment 1
[0050]Take 120 parts of diamond wire-cut silicon powder and 30 parts of millimeter-sized polysilicon powder, mix them evenly by dry method, put the dry mixture into a crucible with a porous ceramic filter at the bottom, keep the materials loose, and cover the mixture evenly with a layer Millimeter polysilicon powder with a thickness of 20mm is sent to the vacuum furnace; turn on the vacuum pump, heat up to 400-700°C, and the pressure is -900-20KPa, the holding time is 0.5-1.5 hours, and the vacuum degree is controlled at 500pa-1000pa. Residual moisture and organic impurities in the material; turn on the argon preheating heater, open the argon tank, and feed argon into the vacuum furnace. The argon is fed through the porous ceramic filter at the bottom of the mixture to maintain the above pressure and vacuum ℃, heat up the vacuum furnace quickly and maintain the temperature at 1300-1400°C, adjust the valve of the argon tank during the heating process, control the argon flow rate...
Embodiment 2
[0052] Take 90 parts of diamond wire-cut silicon powder, 20 parts of millimeter-sized polycrystalline silicon powder, and 50 parts of silicon oxide compound, mix them in high-purity water, stir at a high speed of 800-2000rpm / min for 0.5-1.5 hours, and use a diaphragm for the mixed slurry The filter press removes water to form a filter cake, and the filter cake is dried by a scraper film dryer to form a uniform dry mixture; the dry mixture is placed in a crucible with a porous ceramic filter at the bottom to keep the material loose. The top of the material is evenly covered with a layer of millimeter-scale polysilicon powder with a thickness of 20mm, and sent to the vacuum furnace; turn on the vacuum pump, heat up to 400-700°C, and the pressure is -900-20KPa, the holding time is 0.5-1.5 hours, and the vacuum is controlled. The temperature is 500pa-1000pa to remove the residual moisture and organic impurities in the material; turn on the argon preheating heater, open the argon ta...
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