Making method of piezoelectric composite materials

Abstract

The invention relates to a making method of piezoelectric composite materials. The making method of the piezoelectric composite materials comprises the following steps of bonding piezoelectric materials to a plate; cutting the piezoelectric materials bonded to the plate, wherein the depth of cutting cracks of the piezoelectric materials is less than the thickness of the piezoelectric materials; filling the cutting cracks of the piezoelectric materials with decoupling materials; using the plate as a standard, and grinding the upper surfaces of the solidified piezoelectric materials filled with the decoupling materials; then taking down the piezoelectric materials, and grinding the lower surfaces of the piezoelectric materials; and arranging electrodes on the surfaces of the ground piezoelectric materials, so as to obtain the piezoelectric composite materials. According to the making method disclosed by the invention, in the processing process, the situation that the piezoelectric materials are curved can be avoided, the right order and the regularity of the shape of microlite elements are effectively guaranteed, and reliable guarantee is provided for the consistency of plane array probes.

Description

technical field [0001] The invention belongs to the field of preparation of two-dimensional surface ultrasonic transducers, in particular to a method for manufacturing a piezoelectric composite material. Background technique [0002] In recent years, the demand for three-dimensional ultrasound imaging, three-dimensional spatial acoustic stimulation, acoustic manipulation, and acoustic therapy has been increasing, and the performance requirements for two-dimensional area array ultrasonic transducers are also getting higher and higher. The core component of the two-dimensional array ultrasonic transducer is the area probe, and the quality of the area probe is directly related to the quality level of the entire two-dimensional array ultrasonic transducer. [0003] An area array probe usually consists of one to thousands of individual piezoelectric array elements (or called piezoelectric units). The consistency among the various piezoelectric array elements is an important fact...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a method for manufacturing piezoelectric composite materials to solve the problem that in the manufacturing process of piezoelectric composite materials in the prior art, it is easy to cause deformation of piezoelectric composite materials or misalignment between microcrystal elements, which seriously affects the surface array. Probe Consistency Issues

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