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Groove grinding disc and method for manufacturing groove grinding disc

A grinding disc and groove technology, which is applied in the field of grinding and polishing, can solve the problems of blocking and wear of the grinding disc, and achieve the effects of reducing the deformation of the workpiece, overcoming the difficulty of taking the mold, and improving the grinding environment.

Pending Publication Date: 2020-04-03
HUAQIAO UNIVERSITY
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The object of the present invention is to provide a grooved grinding disc and a method for making the grooved grinding disc, so as to improve the flow performance of the grinding liquid during the grinding and polishing process, and significantly improve the problem of grinding disc clogging and wear

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  • Groove grinding disc and method for manufacturing groove grinding disc

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Embodiment Construction

[0028] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0029] A grooved grinding disc, reference Figures 1 to 2 , the grinding disc is provided with grooves; the grooves are formed by coupling a plurality of concentric grooves 1 with gradually enlarged radii and a plurality of helical grooves 2 equidistantly arranged; the center of the helical grooves 2 Concentric with the center of the concentric circular groove 1; the grinding disc is divided into the first area 3, the second area 4 and the third area 5 from the inside to the outside in the radial direction; the first area 3 and the third area 5 The distance between the concentric circular grooves 1 is larger than the distance between the concentric circular grooves 1 of the second region 4 . The disc surface diameter of the grinding disc is 300 to 2000 mm. The concentric circular grooves 1 and the helical grooves 2 have a cross-sectional groo...

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Abstract

The invention provides a groove grinding disc and a method for manufacturing the groove grinding disc. The grinding disc is provided with a groove; the groove is formed by coupling a plurality of concentric grooves with radii gradually increasing and a plurality of spiral line grooves which are arranged at equal intervals; the centers of the spiral line grooves are concentric with the centers of the concentric grooves; the grinding disc is divided into a first area, a second area and a third area from inside to outside in the radial direction; and the distance between the concentric grooves ofthe first area and the distance between the concentric grooves of the third area are greater than the distance between the concentric grooves of the second area. The application of the technical scheme can realize the improvement of the flow performance of grinding liquid in the grinding and polishing process, and the problems of blockage and wear of the grinding disc are obviously improved.

Description

technical field [0001] The invention relates to the technical field of grinding and polishing, in particular to a grooved grinding disc and a method for manufacturing the grooved grinding disc. Background technique [0002] With the rapid development and wide application of semiconductor technology, the processing of semiconductor materials is becoming more and more precise. Grinding and polishing, as an important processing method in precision and ultra-precision processing, plays a key role in the semiconductor manufacturing process because of its high processing accuracy. [0003] In recent years, with the continuous increase of wafer size and the continuous improvement of surface quality requirements, grinding and polishing technology is facing higher requirements and challenges. The traditional free abrasive grinding and polishing technology is no longer suitable because of its low processing efficiency, high environmental pollution, and poor surface accuracy caused by...

Claims

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Application Information

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IPC IPC(8): B24B37/11B24D18/00
CPCB24B37/11B24D18/0054B24D18/009
Inventor 方从富徐超群彭正一赵再兴徐西鹏
Owner HUAQIAO UNIVERSITY
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