Two-dimensional black phosphorus/transitional metal chalcogenide heterojunction device and preparation method therefor
A transition metal chalcogenide and compound technology, applied in the field of microelectronics, can solve problems such as being unsuitable for heterojunction, and achieve the effects of simple preparation method, simple and easy method, and small contact resistance
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Embodiment 1
[0028] A device based on a two-dimensional black phosphorus / transition metal chalcogenide heterojunction, such as figure 1 As shown, the heterojunction is two-dimensional black phosphorus nanoflakes and two-dimensional transition metal chalcogenide MoS 2 Nano-flake stack structure, the number of layers of two-dimensional black phosphorus is 5 layers, two-dimensional MoS 2 The thickness of the nanosheet is 8 layers, the material of the device electrode is 80nm Au, and the substrate of the device is a silicon oxide sheet, SiO 2 The thickness is 270nm.
[0029] Based on the two-dimensional black phosphorus / MoS 2 Heterojunction devices are used to prepare bipolar transistors, the steps are as follows:
[0030] 1) Mechanically exfoliate the black phosphorus single crystal to obtain a two-dimensional black phosphorus nanosheet with 5 layers, which is used as the base of the transistor;
[0031] 2) Preparation of two-dimensional MoS by atmospheric pressure chemical vapor depositi...
Embodiment 2
[0037] A device based on a two-dimensional black phosphorus / transition metal chalcogenide heterojunction, such as figure 2 As shown, the heterojunction is two-dimensional black phosphorus nanoflakes and two-dimensional MoS 1.6 Se 0.4 Nano-flake stack structure, the number of layers of two-dimensional black phosphorus is 2 layers, two-dimensional MoS 1.6 Se 0.4 The thickness of the nanoflakes is 1 layer, that is, for MoS 2 Doping with Se, the material of the device electrode is 80nm metal Au, the substrate of the device is a silicon oxide wafer, SiO 2 The thickness is 270nm.
[0038] The two-dimensional black phosphorus / transition metal chalcogenide based heterojunction device is used to prepare a field effect transistor, and the steps are as follows:
[0039] 1) Mechanical exfoliation of black phosphorus single crystals to obtain bilayer two-dimensional black phosphorus nanoflakes in heterojunctions;
[0040] 2) Preparation of two-dimensional monolayer MoS by atmospheri...
Embodiment 3
[0046] A device based on a two-dimensional black phosphorus / transition metal chalcogenide heterojunction, such as image 3 As shown, the heterojunction is two-dimensional black phosphorus nanosheets and two-dimensional WS 2 Nano-flake stack structure, the number of layers of two-dimensional black phosphorus is one layer, two-dimensional WS 2 The thickness of the nanosheet is 1 layer, the electrode material of the device is 80nm conductive metal Au, and the substrate of the device is a silicon oxide sheet, SiO 2 The thickness is 270nm.
[0047] The two-dimensional black phosphorus / transition metal chalcogenide based heterojunction device is used to prepare a photodetector / photodiode, and the steps are as follows:
[0048] 1) Mechanical exfoliation of black phosphorus single crystals to obtain two-dimensional black phosphorus nanoflakes in heterojunctions;
[0049] 2) Preparation of 2D WS by atmospheric pressure chemical vapor deposition 2 Nano flakes, its preparation proces...
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