Plasma polishing device used for quickly polishing aspheric surfaces with medium and large calibers

Abstract

The invention discloses a plasma polishing device used for quickly polishing aspheric surfaces with medium and large calibers. The plasma polishing device consists of a plasma source, a robot, a sealing part, an argon-fluorine waste gas treatment part, an electrical control system, a base, a polishing workbench, a to-be-processed optical part and a nitrogen gas inlet part, wherein the robot, the to-be-processed optical part and the polishing workbench are arranged on the base; the plasma source is positioned above the to-be-processed optical part; the to-be-processed optical part is clamped on the polishing workbench; the robot controls a movement posture of the plasma source, so that the plasma source is always perpendicular to the surface of the to-be-processed optical part; the sealing part adopts an integral sealing structure which is isolated from the outside atmosphere; the polishing of the whole device is controlled by the electrical control system; the nitrogen gas inlet part can be used for charging nitrogen with concentration which meets experimental requirements; and the argon-fluorine waste gas treatment part is used for exhausting the treated waste gas into the atmosphere. The plasma polishing device has the main advantages that the robot is adopted for control, processing operation instrumentation can be conveniently realized, and engineering production application can be realized.

Description

technical field [0001] The invention relates to a "plasma polishing device for fast polishing of medium and large diameter aspheric surfaces", belonging to the technical field of large diameter aspheric surface optical parts in plasma processing. Background technique [0002] With the increasing application of large-aperture aspheric optical parts in various fields, not only high surface accuracy, low surface roughness, no surface and sub-surface damage are required for large-aperture aspheric optical parts, Furthermore, it is required to improve the processing efficiency. Atmospheric plasma processing technology is a new technology combining plasma source and chemical vapor processing equipment. Its working principle is to use plasma to chemically interact with workpiece surface materials to remove materials. It is a non-contact processing method. This method can be used for Large-area flat polishing, local polishing, aspheric forming and polishing, etc., can avoid the app...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the processing efficiency and surface quality problems of the surface defect layer and the grinding damage layer of large-diameter aspheric optical parts, and provide a plasma polishing device for fast polishing of medium and large-diameter aspheric surfaces

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