Superconducting fractal nanowire single-photon detector and preparation method thereof

A single-photon detector, nanowire technology, applied in superconductive devices, so-called superconductivity, superconductor components and other directions, can solve the problem of polarization sensitivity, achieve the effect of efficient absorption and reduce polarization sensitivity

Inactive Publication Date: 2016-03-02
TIANJIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, there is a problem with SNSPD at present: polarization sensitivity
[0008] Using amorphous tungsten silicide (WSi) as the device material, although the efficiency of both polarization states can reach 80%, the three-dimensional double-layer structure will be very challenging for polycrystalline niobium nitride (NbN)

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  • Superconducting fractal nanowire single-photon detector and preparation method thereof
  • Superconducting fractal nanowire single-photon detector and preparation method thereof
  • Superconducting fractal nanowire single-photon detector and preparation method thereof

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Embodiment 1

[0046] A superconducting fractal nanowire single photon detector. The overall technical scheme of the superconducting fractal nanowire single photon detector follows the following idea: first design a structure that reduces the low sensitivity of the nanowire to light absorption polarization, and then change the The arrangement of nano-antennas achieves high-efficiency absorption on the basis of low polarization sensitivity.

[0047] see figure 1 (d), the superconducting fractal nanowire single photon detector includes: substrate 1, nanowire 2, nanoantenna 3, hydrogen silsesquioxane layer 4 (HSQ) and silver reflective layer 5, nanowire 2 Arranged in a fractal form to ensure that the nanowires 2 are insensitive to the absorption polarization of light in two polarization states. A two-dimensional array nano-antenna 3 is added on the basis of the nano-wire 2 to increase light absorption efficiency.

[0048] The nanowire 2 in the embodiment of the present invention is composed o...

Embodiment 2

[0052] The following is combined with specific figure 1 (a), figure 1 (b) with figure 1 (c), and the corresponding mathematical formulas describe in detail the structure of the superconducting fractal nanowire single photon detector in Example 1, see below for details:

[0053] figure 1 (a) shows the structure of a fractal nanowire 2 (Peano structure). This type of nanowire 2 design is suitable for polycrystalline, monocrystalline or amorphous materials. figure 1 (b) with figure 1 The dashed box in (c) is the smallest structural unit that constitutes the secondary structure and the tertiary structure, and the black dashed line is the connection direction of the smallest structural unit. figure 1 (d) for figure 1 (b) The cross-sectional view cut by the solid black line in (b).

[0054] see figure 1 (d), the light is incident from bottom to top, L c is the length of the optical cavity; the electric field vibration direction of TM (transverse magnetic wave) is vertical t...

Embodiment 3

[0071] A kind of preparation method of superconducting fractal nanowire single photon detector, see figure 2 and image 3 , the preparation method comprises the following steps:

[0072] 101: sputtering a layer of superconducting material on the substrate 1 by means of magnetron sputtering;

[0073] 102: Prepare electrodes by combining photolithography and electron beam evaporation;

[0074] 103: Preparation of fractal nanowires 2 by combining electron beam exposure and reactive ion beam etching;

[0075] 104: Prepare the nano-antenna 3 by combining electron beam exposure (overlaying with the nanowire 2) and electron beam evaporation.

[0076] In summary, the embodiment of the present invention realizes the preparation of the superconducting fractal nanowire single photon detector through the above steps 101 to 104, which meets various needs in practical applications.

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Abstract

The invention discloses a superconducting fractal nanowire single-photon detector and a preparation method thereof. The single-photon detector comprises a substrate, nanowires, a nano antenna, a hydrogen silsequioxane layer and a silver reflecting layer, wherein the nanowires are arranged in a fractal manner and are used for achieving insensitive absorption and polarization of the nanowires on light in two polarization states; and an array nano antenna is added on the basis of the nanowires. The preparation method comprises the following steps: sputtering a layer of superconducting material on the substrate by a magnetron sputtering method; preparing an electrode in a manner of combining photoetching and electronic beam evaporation; the fractal nanowire is prepared in a manner of matching electron beam exposure with reactive ion beam etching; and the nano antenna is prepared in a manner of combining the electron beam exposure with the electronic beam evaporation. According to the superconducting fractal nanowire single-photon detector, the polarization sensitivity of the superconducting nanowire single-photon detector is lowered; the polarization sensitivity is less than 0.02; the absorption efficiencies of two orthogonal polarization states reach 80%; the wideband absorption efficiency is higher than 70%; and the superconducting fractal nanowire single-photon detector is applicable to various superconducting materials.

Description

technical field [0001] The invention relates to the field of single-photon detectors, in particular to a superconducting fractal nanowire single-photon detector and a preparation method thereof. Background technique [0002] Single photon detectors are optoelectronic devices that can detect a single photon, the smallest energy unit of light. As a fundamental device in the field of quantum optical detection, single-photon detectors appear in many fields of scientific research and applications, including: photon counting communication, biomedical imaging or time-resolved spectroscopy, etc. [0003] Superconducting nanowire single photon detector (SNSPD) is a new type of single photon detector in the early 21st century. Compared with the previous photomultiplier tube (PMT) and avalanche diode detector (APD), it uses the The superconducting transition converts optical signals into electrical signals, and photon counting is achieved by counting electrical signals. The detector ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L39/00H01L39/02
CPCH10N60/99H10N60/00H10N60/80
Inventor 胡小龙顾超程宇豪朱晓田刘海毅
Owner TIANJIN UNIV
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