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Palladium alloy catalytic membrane material and preparation method thereof

A thin film material and palladium alloy technology are applied in the field of palladium alloy catalytic thin film material and its preparation, which can solve the problems of increasing the preparation cost of dimming glass, voids in the surface layer of Pd, and low life of the dimming mirror, so as to improve the service life and reduce the production time. Cost, the effect of large economic benefits

Inactive Publication Date: 2016-02-03
SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] At present, palladium (Pd) is the main material used for the light-adjusting thin film catalytic layer. Pd is relatively expensive, which increases the preparation cost of light-adjustable glass; and the Pd surface layer is cracked due to the volume expansion of the hydride during the hydrogen absorption and desorption process. Cavitation occurs, which is easy to be damaged, resulting in a low service life of the dimming mirror

Method used

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  • Palladium alloy catalytic membrane material and preparation method thereof
  • Palladium alloy catalytic membrane material and preparation method thereof
  • Palladium alloy catalytic membrane material and preparation method thereof

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preparation example Construction

[0044] In the preparation method, the physical deposition method is magnetron sputtering, pulsed laser sputtering, and evaporation coating.

[0045] Described preparation method, preparation steps are as follows:

[0046] (1) Preparation of magnesium alloy thin film layer: at room temperature, put the cleaned substrate into the sputtering chamber, introduce gas, adjust the deposition pressure, and co-sputter deposit magnesium alloy and other pure metals by DC magnetron sputtering The target material, by changing the sputtering power to control the formation of alloy films of different components, by adjusting the sputtering time to control the thickness of the deposited film, depositing a layer of magnesium alloy film on the substrate;

[0047] (2) Preparation of the catalytic layer: after preparing the magnesium alloy layer, adjust the appropriate pressure, co-sputter deposit pure metal Pd, Ni, Ti, and control the formation of alloy films with different components by changing...

Embodiment 1

[0056] 1) Preparation of magnesium alloy film

[0057] The preparation of the thin film adopts the magnetron sputtering method and utilizes a DC magnetron sputtering apparatus. The target components are pure Mg metal, pure Ni metal and pure Pd metal, respectively. Put the cleaned ordinary glass substrate, quartz glass, ITO glass or single crystal silicon substrate (substrate selection depends on the test used) into the vacuum chamber, and the background vacuum of the sputtering chamber reaches 10 -5 Below the order of magnitude, feed high-purity argon gas with a flow rate of 40sccm; adjust the rotation speed to 15r / min; and deposit pressure to 0.5Pa. After stabilization, co-sputter Mg and Ni on the substrate with powers of 40W and 16W respectively for 110s. X-ray analysis of its composition is Mg 4 Ni;

[0058] 2) Preparation of palladium alloy catalytic layer

[0059] ①Preparation of PdTi alloy film

[0060] After preparing the magnesium alloy thin film, continue to co-s...

Embodiment 2

[0066] Dimming speed performance test using figure 2 The device shown is evaluated, and the glass sheet 4 coated with the magnesium-nickel alloy thin film is set opposite to an ordinary glass sheet 5, so that the side coated with the magnesium-nickel alloy thin film faces the ordinary glass sheet 5, and a silica gel is used between the two glass sheets. Gasket 6 is separated to form a cavity that can pass into hydrogen or deuterium gas, and gas flow detector 7 is used to control the gas, and semiconductor laser 8 and silicon photodiode 9 are respectively arranged on the glass sheet coated with magnesium-nickel alloy film. 4 and the outer side of the ordinary glass sheet 5, the signal processing system 10 is connected in series between the silicon photodiode 9 and the semiconductor laser 8. During the test, a hydrogen-argon mixed gas with a volume fraction of 4% was introduced between the two glass plates, and then a 670nm laser was used to irradiate the two glass plates, and ...

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Abstract

The invention discloses a palladium alloy catalytic membrane material and a preparation method thereof. The chemical composition of the catalytic membrane material is PdMx, wherein the M is Ti or Ni; the x is larger than 0 and smaller than 0.5.

Description

technical field [0001] The invention relates to a catalytic thin film material and a preparation method thereof, in particular to a palladium alloy catalytic thin film material capable of catalyzing hydrogen gas dissociation and applicable to dimming glass and a preparation method thereof. Background technique [0002] With the development of society, energy and environmental issues have become increasingly prominent, and energy conservation and environmental protection are inevitable requirements for sustainable development. According to reports, my country's building energy consumption accounts for 34% of the total energy consumption of the society. Compared with developed countries, my country's buildings not only consume a lot of energy, but also have low energy utilization efficiency. Glass doors and windows are the main channel for heat exchange between buildings and the outside world, and energy saving of doors and windows is the key to building energy conservation. ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01J23/44B01J23/89
Inventor 包山虎张小丽金平实曹逊
Owner SHANGHAI INST OF CERAMIC CHEM & TECH CHINESE ACAD OF SCI
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