UV-LED with quantum dot structure
A technology of light-emitting diodes and quantum dots, which is applied in semiconductor devices, electrical components, circuits, etc., can solve the problems of insignificant electron overflow hole injection efficiency and insufficient energy bandgap, so as to enhance luminous power and brightness, eliminate energy With bending, the effect of improving compound efficiency
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[0017] Such as figure 1 As shown, a UV-LED with a p-type AlN / AlGaN quantum dot electron blocking layer structure includes a sapphire substrate 101, an AlN nucleation layer 102, an undoped AlGaN buffer layer 103, and an n-type AlGaN layer 104, Al x Ga 1-x N / Al y Ga 1-y N multi-quantum well active region 105, p-type AlN / AlGaN quantum dot electron blocking layer 106, p-type AlGaN layer 107 and indium tin oxide conductive layer (ITO) 108, n-type ohmic electrode 110 drawn on the n-type AlGaN layer , a p-type ohmic electrode 109 drawn on an indium tin oxide conductive layer (ITO).
[0018] Preferably, the sapphire substrate 101 is an r-plane sapphire substrate.
[0019] Preferably, the thickness of the AlN nucleation layer 102 is 20-100nm, the thickness of the non-doped AlGaN buffer layer 103 is 100-800nm, the thickness of the n-type AlGaN layer 104 is 800-1000nm, Al x Ga 1-x N / Al y Ga 1-y The period number of the N multi-quantum well active region 105 is 5-10, the thickne...
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